Scanning Probe Rigid Sensor Lens Assembly

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Solution Overview

Problem

Current scanning probes face challenges in achieving high accuracy and mechanical stability due to the need for larger and more complex optical systems, which introduce mechanical instability and weight issues, leading to degradation in performance and accuracy.

Innovation Solution

A scanning probe design with a rigidly attached sensor lens assembly and adjustable light projecting unit, where the position and orientation of the light plane are fixed during assembly, reducing the need for adjustable optical components and minimizing mechanical instability, while maintaining high numerical aperture for improved accuracy.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If larger and more complex optical systems are used to achieve high accuracy, then measurement precision is improved, but mechanical stability deteriorates due to increased weight and complexity

Engineering Contradiction:
ImproveaccuracyVSAvoidmechanical stability
Core Design Contradiction:
Measurement precisionVSStability of the object's composition

Solution Approach 1:

The optical system is segmented into fixed optical components (sensor lens assembly rigidly attached to base plate) and adjustable components (light projecting unit with adjustable position and orientation). This segmentation allows the heavy optical components to be fixed and stable while only the lighter light source needs adjustment capability.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Instead of making the sensor lens assembly adjustable to achieve proper alignment, the patent inverts the approach by making the light projecting unit adjustable. The sensor lens assembly remains fixed and rigidly attached, eliminating the mechanical instability associated with adjustable optical components while still achieving proper optical alignment.

Inventive Principle:
Principle #13The other way round (Inversion)

2Measurement precision

If larger lenses are used to improve accuracy, then measurement precision is improved, but weight increases leading to mechanical instability

Engineering Contradiction:
ImproveaccuracyVSAvoidweight
Core Design Contradiction:
Measurement precisionVSWeight of moving object

Solution Approach 1:

The patent inverts the conventional approach by making the light projecting unit (light source) adjustable rather than the sensor lens assembly. This allows larger, higher-quality lenses to be used in the fixed sensor assembly without the penalty of making the entire assembly adjustable and heavier, while still achieving proper optical alignment through adjustment of the lighter light source.

Inventive Principle:
Principle #13The other way round (Inversion)

3Adaptability or versatility

If adjustable optical components are used to achieve proper alignment, then adaptability is improved, but device complexity increases and mechanical stability decreases

Engineering Contradiction:
Improvealignment capabilityVSAvoidcomplexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent applies inversion by making the light projecting unit adjustable instead of the sensor lens assembly. This reduces complexity because the adjustable light source requires simpler adjustment mechanisms compared to adjusting the entire sensor assembly with its heavy lens elements. The adjustable light unit can achieve proper optical alignment without requiring the complex adjustable mounting system that would be needed for the sensor assembly.

Inventive Principle:
Principle #13The other way round (Inversion)

Solution Approach 2:

The patent extracts the adjustment capability from the sensor lens assembly and places it in the light projecting unit. This separation allows the sensor assembly to be simple, fixed, and rigidly mounted, while the adjustment functionality is isolated to the lighter light source components, reducing overall system complexity and improving mechanical stability.

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enhances the scanning probe's accuracy and mechanical stability by reducing mechanical instability and weight, allowing for larger lenses without additional size or weight penalties, resulting in improved performance and long-term reliability.

Implementation Method 1

The sensor lens assembly (124) transmits and focuses light reflected from a surface of an object onto an imaging device

Methodology Applied
Scientific EffectOptical focusing: Lens

Implementation Method 2

a light projecting unit for generating and projecting a light plane onto an object

Methodology Applied
Scientific EffectLight projection: Light

Implementation Method 3

an imaging device for detecting and capturing an image of the focused light pattern

Methodology Applied
Scientific EffectOptical detection: Photoelectric Effect

Data Source

PatentEP2831539B1Improved optical scanning probe
Publication Date: 2019.06.05 NIKON METROLOGY
  • EP2831539B1 patent drawingFigure 1
  • EP2831539B1 patent drawingFigure 2
  • EP2831539B1 patent drawingFigure 3

AI summary

The present invention relates to a scanning probe (100) for the dimensional acquisition of an object (400) by irradiating the object (400) with light and detecting reflected light comprising: a detection unit (120) comprising an imaging sensor (122) and a sensor lens assembly (124) for detecting the reflected light, a light projecting unit (141 ) comprising a light source (142) for generating light, and source optics (145) for focusing the light, and light plane generating optics (143) for generating a light plane (149) for irradiating the object, and an adjustment mechanism (155) comprised in the light projecting unit (141 ), for adjusting the position or orientation of the light plane relative to the detection unit. It further relates to a method for assembly of a scanning probe (100).