Optical Scanning System with Velocity Tracking Mirrors
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Solution Overview
Problem
Current optical scanning systems face challenges in generating stable images of continuously moving substrates due to velocity fluctuations, leading to unacceptable levels of image blur, particularly in high-throughput scanning applications.
Innovation Solution
The optical scanning system incorporates a stage with a velocity tracking mirror and an acceleration tracking mirror, adjusted by electrical motors controlled by a module that sends driving signals based on velocity and acceleration measurements, thereby stabilizing the image during image capture.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If traditional image on the fly scanning is used with lightweight stages, then system cost and complexity are reduced, but image blur increases due to velocity fluctuations
Solution Approach 1:
The system employs a feedback mechanism where a linear encoder continuously measures the actual position of the moving stage, and a controller processes this information to generate correction signals. These correction signals are sent to galvanometer mirrors that actively compensate for stage velocity fluctuations, thereby maintaining stable imaging despite using lightweight, low-cost stages with surface irregularities
Solution Approach 2:
The patent introduces an intermediary compensation system consisting of the linear encoder, controller, and galvanometer mirrors. This intermediary system acts as a mediator between the imperfect lightweight stage and the imaging system, translating stage position information into corrective mirror movements that stabilize the optical path and eliminate image blur
2Productivity
If high acceleration and deceleration are used in step and repeat systems, then throughput is improved, but image stability deteriorates due to stage settling time requirements
Solution Approach 1:
The system implements continuous scanning where the stage moves continuously through the entire field of view without stopping or repeating cycles. This continuous motion eliminates the acceleration and deceleration phases inherent in step and repeat systems, allowing the lightweight stage to maintain stable velocity throughout the scan and produce sharp images across all fields simultaneously
Solution Approach 2:
The patent transitions from static step-and-hold positioning to dynamic continuous scanning. The stage operates in a dynamic state with continuous motion, and the feedback system dynamically adjusts the galvanometer mirrors in real-time to compensate for velocity variations, enabling high throughput without sacrificing image quality
3Manufacturing precision
If near-constant velocity stages are used to eliminate pixel smear, then image stability is improved, but system cost and weight increase
Solution Approach 1:
The patent replaces the mechanical solution (heavy stages with precision mechanisms to enforce constant velocity) with an optical-electronic solution. Instead of mechanically constraining the stage to constant velocity, the system uses a linear encoder to measure actual position, processes this data through a controller, and uses galvanometer mirrors to optically compensate for velocity fluctuations, achieving stable imaging with lightweight stages
Data Source
AI summary
Disclosed herein is a high throughput optical scanning device and methods of use. The optical scanning device and methods of use provided herein can allow high throughput scanning of a continuously moving object with a high resolution despite fluctuations in stage velocity. This can aid in high throughput scanning of a substrate, such as a biological chip comprising fluorophores. Also provided herein are improved optical relay systems and scanning optics.


