Schottky Diode Dual Guard Ring Segmentation
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Solution Overview
Problem
Conventional Schottky diodes suffer from high reverse leakage current and low breakdown voltage, particularly in high-voltage applications, due to the large area consumption of deep guard ring regions which compromises integration density.
Innovation Solution
A Schottky diode design featuring dual guard ring regions, where an outer guard ring region encloses a plurality of inner guard stripes with a shallower junction depth, reducing reverse leakage current and enhancing breakdown voltage while maintaining high integration density.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a deep guard ring region is used to reduce the electric field near the Schottky contact, then the breakdown voltage increases and reverse leakage current decreases, but the area consumption increases and integration density deteriorates
Solution Approach 1:
The single deep guard ring region is segmented into multiple shallower guard ring regions arranged in a specific pattern. This segmentation allows the electric field reduction function to be distributed across multiple regions, achieving the same reliability improvement without requiring a single deep structure that consumes excessive area.
Solution Approach 2:
The solution transitions from a vertical dimension approach (single deep guard ring) to a horizontal dimension approach (multiple shallower guard rings arranged spatially). By distributing the guard ring structures across the horizontal plane rather than concentrating depth, the patent reduces area consumption while maintaining the electric field management function.
2Object-generated harmful factors
If a deep guard ring region is used to reduce the electric field near the Schottky contact, then the reverse leakage current decreases, but the area consumption increases and integration density deteriorates
Solution Approach 1:
The reverse leakage current reduction function is achieved through multiple segmented guard ring regions rather than a single deep structure. Each shallower guard ring segment contributes to reducing the electric field concentration, collectively achieving low reverse leakage without the area penalty of a deep single structure.
Solution Approach 2:
Each guard ring region is designed with appropriate local characteristics (shallower depth, specific spacing, strategic positioning) to optimize the electric field distribution at critical locations. This local optimization approach reduces reverse leakage current more efficiently than a uniform deep structure.
3Area of stationary object
If the guard ring region is made shallower to reduce area consumption, then the integration density improves, but the breakdown voltage and reverse leakage performance deteriorate
Solution Approach 1:
Multiple shallower guard ring regions work collectively to achieve the same breakdown voltage enhancement that a single deep structure would provide. The segmented approach distributes the voltage management function across multiple structures, maintaining reliability while reducing area consumption.
Solution Approach 2:
Multiple shallower guard ring regions are combined in a specific spatial arrangement to achieve the cumulative effect of a single deep guard ring. By merging the functions of multiple shallow structures, the patent achieves equivalent or superior performance with reduced area consumption.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The dual guard ring structure effectively decreases reverse leakage current and increases breakdown voltage, enabling more efficient and compact high-voltage Schottky diodes with improved current drivability.
Implementation Method 1
The electrical field between the Schottky contact 12 and the semiconductor material 11 needs to be minimized for reducing reverse current and achieving higher breakdown voltage
Implementation Method 2
When a metal layer contacts with a lightly doped semiconductor material, a contact effect comparable to a PN-junction appears. It is called the Schottky contact
Data Source
AI summary
The present invention discloses a Schottky diode. The Schottky diode comprises a cathode region, an anode region and a guard ring region. The anode region may comprise a metal Schottky contact. The guard ring region may comprise an outer guard ring and a plurality of inner guard stripes inside the outer guard ring. And wherein the inner guard stripe has a shallower junction depth than the outer guard ring.


