Multiplexed Schottky Photodiode Array for Imaging

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Solution Overview

Problem

Existing multi-pixel detector arrays face challenges in packaging and integration due to the need for individual connections to external circuitry, which reduces the geometrical fill factor and dynamic range, and is costly for large arrays, especially when using techniques like Flip Chip or Bridge Bonding.

Innovation Solution

A multi-pixel photo detector array with a Schottky photodiode structure featuring a distributed anode contact buried in metal-filled trenches, connected to a common anode current collecting grid and shared cathode contact, allowing multiplexing of pixel information through a reduced number of leads, and adaptable trench depth and spacing for unique depletion layer thickness and pinch-off conditions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If individual connections are provided for each pixel to external circuitry, then each pixel can be individually addressed and read out, but the geometrical fill factor and dynamic range are reduced, and packaging complexity increases

Engineering Contradiction:
Improveindividual pixel addressingVSAvoidgeometrical fill factor
Core Design Contradiction:
Ease of operationVSArea of stationary object

Solution Approach 1:

Multiple pixel anode contacts are merged into a single common anode contact that collects current from all pixels. This combining approach eliminates the need for individual anode connections per pixel, thereby increasing the geometrical fill factor while maintaining individual pixel addressing capability through the shared contact structure.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The common anode contact serves multiple functions simultaneously: it acts as the current collection point for all pixels, provides a reference potential for the photodiode junctions, and enables individual pixel selection through cathode contact control. This multi-functionality reduces the number of required connections while preserving full addressing capability.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Loss of information

If individual connections are provided for each pixel, then complete pixel information can be read out, but the number of leads increases and packaging becomes more complex and costly

Engineering Contradiction:
Improvepixel information completenessVSAvoidnumber of leads
Core Design Contradiction:
Loss of informationVSDevice complexity

Solution Approach 1:

The patent merges multiple individual anode connections into a single common anode contact that serves all pixels. This consolidation dramatically reduces the number of leads required for packaging while maintaining the ability to read out information from each pixel individually through the shared contact and pixel-specific cathode controls.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

Instead of providing individual connections in the planar dimension, the patent uses a shared three-dimensional contact structure that collects current from multiple pixels vertically and laterally. This dimensional approach allows multiple pixels to share a single contact point without losing individual addressing capability.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Ease of operation

If Flip Chip or Bridge Bonding techniques are used for integration, then individual pixel connections are achieved, but the process becomes more complex and costly

Engineering Contradiction:
Improveindividual pixel connectionVSAvoidfabrication process complexity
Core Design Contradiction:
Ease of operationVSEase of manufacture

Solution Approach 1:

The patent combines multiple pixel anode contacts into a single common contact structure, eliminating the need for complex Flip Chip or Bridge Bonding techniques that would be required to establish individual connections for each pixel. This merging approach simplifies the fabrication process while maintaining individual pixel connectivity through the shared contact.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent extracts the complex individual connection requirement by providing only a common anode contact, removing the need for sophisticated packaging techniques. The individual pixel connection need is satisfied through the shared contact combined with pixel-specific cathode control, thereby extracting and eliminating the complexity of advanced bonding processes.

Inventive Principle:
Principle #2Taking out (Extraction)

4Reliability

If the active region thickness is increased to enhance photon detection effectiveness, then sensitivity to long wavelength photons improves, but the device structure becomes more complex

Engineering Contradiction:
Improvephoton detection effectivenessVSAvoidstructure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent merges multiple pixels into a shared structure with a common anode contact and individual cathode contacts. This merged architecture allows the active region thickness to be increased for enhanced long wavelength photon detection without proportionally increasing overall device complexity, as the shared contact structure serves multiple pixels simultaneously.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The common anode contact structure performs multiple functions: it serves as the current collection point for all pixels, provides the reference potential for the photodiode junctions, and enables individual pixel selection. This multi-functionality allows the active region to be optimized for long wavelength detection without adding proportional complexity to the contact structure.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances photon detection effectiveness by increasing the active region thickness, reduces the number of leads required, and simplifies driving and readout circuitry, while maintaining high sensitivity and fill factor, especially for long wavelength photons, and allows for simultaneous imaging of multiple wavelengths.

Implementation Method 1

Each illuminated pixel of the pixelated scintillator is detected by a respective photodiode of the detector array that converts the light into electrical signals used for imaging purposes

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Implementation Method 2

The thickness of the depleted region of which is adjusted by varying the depth of metal contact trenches in a lightly doped semiconductor epilayer

Methodology Applied
Scientific EffectPhoton absorption: Absorption (EM radiation)

Data Source

PatentUS8338219B2Multiplexed output two terminal photodiode array for imaging applications and related fabrication process
Publication Date: 2012.12.25 STMICROELECTRONICS SRL
  • US8338219B2 patent drawing
  • US8338219B2 patent drawing
  • US8338219B2 patent drawing

AI summary

A detector array for an imaging system may exploit the different sensitivities of array pixels to an incident flux of low energy photons with a wavelength falling near the high end of the range of sensitivity of the semiconductor. The detector array may provide the de-multiplexable spatial information. The detector array may include a two-terminal multi-pixel array of Schottky photodiodes electrically connected in parallel.