Schottky Rectifier with Transparent Layer for High Voltage

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Solution Overview

Problem

Conventional Schottky rectifiers have limited blocking voltage range due to high on-state resistance and leakage currents at high breakdown voltages, making them unsuitable for applications beyond 200V, and the Trench MOS Barrier Schottky device still faces challenges with on-state voltage drop at voltages exceeding 300V.

Innovation Solution

A Schottky diode with a mixed bipolar and unipolar conduction mechanism, featuring a lightly doped transparent layer that forms a Schottky contact and a low injection efficiency junction, reduces on-state resistance and leakage current, and includes a p-transparent layer to control minority carrier injection and plasma formation, enhancing on-state performance and reverse recovery speed.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the doping concentration of the drift region is decreased to increase breakdown voltage, then the blocking voltage range is improved, but the on-state forward voltage drop increases severely

Engineering Contradiction:
Improveblocking voltage rangeVSAvoidon-state forward voltage drop
Core Design Contradiction:
ReliabilityVSLoss of energy

Solution Approach 1:

The patent changes the doping concentration parameter in the drift region to optimize the balance between breakdown voltage and on-state forward voltage drop. By carefully controlling the doping concentration, the device achieves high breakdown voltage while maintaining low on-state resistance, resolving the contradiction between blocking voltage range and energy loss.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs a composite structure combining the drift region with a specially designed contact structure that includes multiple layers with different doping concentrations. This composite approach allows the device to achieve both high breakdown voltage and low on-state forward voltage drop by optimizing the interaction between different regions.

Inventive Principle:
Principle #40Composite materials

2Loss of energy

If the depth of the drift region is increased to reduce on-state resistance, then the on-state forward voltage drop is reduced, but the breakdown voltage decreases

Engineering Contradiction:
Improveon-state forward voltage dropVSAvoidbreakdown voltage
Core Design Contradiction:
Loss of energyVSReliability

Solution Approach 1:

The patent optimizes the depth parameter of the drift region to achieve the right balance. By controlling the depth within a specific range and combining it with appropriate doping concentrations, the device achieves low on-state forward voltage drop while maintaining high breakdown voltage capability.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent applies local quality by creating regions with different doping concentrations at different locations. The drift region has a specific doping profile that varies with depth, allowing different parts of the device to optimize for either low on-state resistance or high breakdown voltage as needed.

Inventive Principle:
Principle #3Local quality

3Device complexity

If conventional Schottky rectifier structure is used for high breakdown voltage applications, then the device simplicity is maintained, but leakage currents increase significantly

Engineering Contradiction:
Improvestructure simplicityVSAvoidleakage currents
Core Design Contradiction:
Device complexityVSObject-generated harmful factors

Solution Approach 1:

The patent applies local quality by introducing a specifically doped region at the Schottky contact interface. This localized modification with appropriate doping concentration creates a potential barrier that reduces leakage currents while maintaining the overall simplicity of the Schottky rectifier structure.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent changes the doping concentration parameter in the drift region to optimize the balance between breakdown voltage and on-state forward voltage drop. By carefully controlling the doping concentration, the device achieves high breakdown voltage while maintaining low on-state resistance, resolving the contradiction between blocking voltage range and energy loss.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution achieves significantly lower on-state resistance and leakage current, faster switching speed, and reduced losses during reverse recovery, enabling higher current capability and improved performance at high blocking voltages.

Implementation Method 1

A Schottky contact is formed at the interface between the metal layer 230 and the drift layer 220

Methodology Applied
Scientific EffectSchottky barrier:

Implementation Method 2

a lightly doped transparent layer that forms a Schottky contact and a low injection efficiency junction, reduces on-state resistance and leakage current, and includes a p-transparent layer to control minority carrier injection and plasma formation

Methodology Applied
Scientific EffectLow injection efficiency junction:

Implementation Method 3

A Schottky diode with a mixed bipolar and unipolar conduction mechanism

Methodology Applied
Scientific EffectBipolar conduction:

Implementation Method 4

the unipolar conduction mechanism of the Schottky rectifier

Methodology Applied
Scientific EffectUnipolar conduction:

Implementation Method 5

control minority carrier injection and plasma formation, enhancing on-state performance

Methodology Applied
Scientific EffectPlasma formation: Plasma

Data Source

PatentEP2630663B1Improved Schottky rectifier and method of fabricating thereof
Publication Date: 2016.10.19 VISHAY GENERAL SEMICONDUCTOR LLC
  • EP2630663B1 patent drawingFigure 1~2
  • EP2630663B1 patent drawingFigure 3~4
  • EP2630663B1 patent drawingFigure 5~6

AI summary

A semiconductor rectifier includes a semiconductor substrate having a first type of conductivity. A first layer, which is formed on the substrate, has the first type of conductivity and is more lightly doped than the substrate. A second layer having a second type of conductivity is formed on the substrate and a metal layer is disposed over the second layer. The second layer is lightly doped so that a Schottky contact is formed between the metal layer and the second layer. A first electrode is formed over the metal layer and a second electrode is formed on a backside of the substrate.