Scintillator Arrangement for Particle Beam Electron Detection

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Solution Overview

Problem

Conventional particle beam systems face challenges in efficiently detecting electrons emanating from an object due to the limited space near the object, making it difficult to arrange a scintillation detector close to the object and transfer light signals effectively.

Innovation Solution

A scintillator arrangement with an electron receiving surface close to the object and a light exit face farther away, utilizing a light guide body or micro channel plate to increase electron detection and guide light rays away from the object, allowing components to process light at a distance without occupying limited space near the object.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the scintillation detector is arranged close to the object to increase electron detection efficiency, then the electron detection efficiency is improved, but the space available for arranging the detector and objective lens is limited

Engineering Contradiction:
Improveelectron detection efficiencyVSAvoidavailable space near object
Core Design Contradiction:
ProductivityVSArea of stationary object

Solution Approach 1:

The scintillator arrangement utilizes a separated geometry where the electron receiving surface is positioned close to the object plane in one dimension, while the light exit face is positioned at a different location along the optical axis. This dimensional separation allows the detector to capture electrons efficiently while accommodating the objective lens and other components in the limited space near the object.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The scintillator arrangement is divided into distinct functional regions: an electron receiving surface for detecting electrons emanating from the object, a scintillator material for converting electron energy to light, and a light exit face for transmitting the generated light rays. This segmentation allows each component to be optimized for its specific function while accommodating spatial constraints.

Inventive Principle:
Principle #1Segmentation

2Loss of information

If the light exit face is positioned close to the object to facilitate light signal transfer, then the light signal transmission is improved, but the components for processing light rays cannot be properly arranged

Engineering Contradiction:
Improvelight signal transmission efficiencyVSAvoidarrangement of light processing components
Core Design Contradiction:
Loss of informationVSDevice complexity

Solution Approach 1:

A light guide body is introduced as an intermediary component that couples the light exit face of the scintillator arrangement to the light processing components. The light guide body efficiently transmits light signals generated in the scintillator to external detectors or processing equipment, eliminating the need for complex direct coupling arrangements while maintaining high light transmission efficiency.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances electron detection efficiency by positioning the electron receiving surface close to the object while allowing light processing components to be placed farther away, effectively overcoming space constraints and improving signal transmission.

Implementation Method 1

a scintillator arrangement which comprises an electron receiving surface, which is arranged such that it is exposed to electrons, which emanate from the object plane, and wherein the scintillator arrangement further comprises a light exit face, wherein the scintillator arrangement is configured, to output light rays, which are generated by electrons being incident on the electron receiving surface

Methodology Applied
Scientific EffectScintillation: Scintillation

Data Source

PatentUS8598525B2Particle beam system
Publication Date: 2013.12.03 CARL ZEISS MICROSCOPY GMBH
  • US8598525B2 patent drawing
  • US8598525B2 patent drawing
  • US8598525B2 patent drawing

AI summary

A particle beam system comprises a particle beam source for generating a particle beam, an objective lens for focusing the particle beam onto an object plane, wherein the objective lens comprises a focal length and an optical axis, and a scintillator arrangement, which comprises an electron receiving surface facing the object plane and which is arranged such that it is exposed to electrons, which emanate from the object plane. The scintillator arrangement further comprises a light exit face, wherein the scintillator arrangement is configured such that light rays which are generated by electrons, which are incident on the electron receiving surface leave the scintillator arrangement at the light exit face.