SCR Phase Compensation for Stable Thermal Processing Power

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Solution Overview

Problem

Thermal processing systems face challenges in maintaining consistent substrate temperature due to fluctuations in AC power supplied to the SCR, leading to variations in lamp output and inefficient heating processes.

Innovation Solution

A power control device that detects power fluctuations and performs phase control compensation by adjusting the phase angle of AC power supplied to the heating source, ensuring stable power delivery and consistent substrate temperature.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Power

If phase angle control is used to control power supplied to the lamp, then power control capability is improved, but temperature stability deteriorates when AC power fluctuations occur

Engineering Contradiction:

Improvepower control capabilityVSAvoidtemperature stability

Core Design Contradiction:

PowerVSReliability

Solution Approach 1:

The patent implements a feedback mechanism by measuring the actual AC power supplied to the SCR and using this measurement to dynamically adjust the phase angle. The power measurement unit continuously monitors the AC power, and the control unit modifies the phase angle based on the measured value to maintain stable lamp output and substrate temperature despite power fluctuations.

Inventive Principle:

Principle #23Feedback

Solution Approach 2:

The patent dynamically changes the phase angle parameter based on measured AC power conditions. By calculating a compensated phase angle that accounts for power fluctuations, the system adapts the control parameter in real-time to maintain consistent power delivery to the heating source.

Inventive Principle:

Principle #35Parameter changes

2Reliability

If AC power supplied to the SCR fluctuates, then device adaptability is worsened, but power measurement and compensation capability can improve reliability

Engineering Contradiction:

Improvetemperature reproducibilityVSAvoidAC power fluctuation tolerance

Core Design Contradiction:

ReliabilityVSAdaptability or versatility

Solution Approach 1:

The system performs preliminary measurement of the AC power supplied to the SCR before executing the heating cycle. By measuring the actual power conditions in advance and calculating the appropriate phase angle compensation beforehand, the system prepares the optimal control parameters to ensure stable temperature control from the start of the heating process.

Inventive Principle:

Principle #10Preliminary action

3Device complexity

If conventional phase control is used without power measurement, then device complexity is reduced, but manufacturing precision of temperature control deteriorates

Engineering Contradiction:

Improvecontrol system simplicityVSAvoidtemperature control precision

Core Design Contradiction:

Device complexityVSManufacturing precision

Solution Approach 1:

The patent replaces conventional mechanical or simple electronic phase control with an intelligent control system that uses power measurement and automated phase angle calculation. The control unit automatically measures power, calculates the compensated phase angle, and adjusts the SCR firing timing, eliminating the need for manual adjustment and improving temperature control precision.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively stabilizes the power supply to the heating source, maintaining the substrate temperature within a close range to the target temperature even with AC power fluctuations, thereby enhancing the reliability of thermal processing.

Implementation Method 1

the power control unit controls the phase of the AC power by compensating a phase angle according to a difference between a reference power value and the measured value measured by the power measurement unit

Methodology Applied

Scientific EffectPhase angle control:

Implementation Method 2

heat the substrate by turning on a plurality of lamps and irradiating the substrate with light

Methodology Applied

Scientific EffectLight irradiation heating:

Implementation Method 3

by changing the timing of the gate current applied to the SCR, a waveform of output power (e.g., output current waveform and output voltage waveform) may be changed, output power of the SCR (i.e., lamp input power) may be changed

Methodology Applied

Scientific EffectPhase angle control method:

Data Source

PatentUS20250076906A1Power control device for temperature control, thermal processing system having the same, and temperature control method for thermal processing system

Publication Date: 2025.03.06 AP SYST INC

AI summary

The present disclosure relates to a power control device for temperature control capable of phase control compensation according to power fluctuations, a thermal processing system having the same, and a temperature control method for the thermal processing system. The power control device for temperature control includes a power control unit configured to control an amount of power supplied to a heating source by controlling a phase of AC power supplied from a power source and a power measurement unit connected to the power source and configured to measure the AC power, wherein the power control unit controls the phase of the AC power by compensating a phase angle according to a difference between a reference power value and the measured value measured by the power measurement unit.