Scraper Mirror Positioning Along Two Axes for EUV Beam Coupling
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Solution Overview
Problem
Existing positioning devices for scraper mirrors in EUV lithography systems lack precise adjustment capabilities in a positioning plane defined by two perpendicular axes, which is crucial for optimal coupling of laser radiation.
Innovation Solution
A positioning device comprising two positioning units, each with a linear guide and a positioning drive, allowing the scraper mirror to be adjusted along two perpendicular axes within the positioning plane, ensuring precise positioning and alignment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a single positioning mechanism is used for the scraper mirror, then the device complexity is reduced, but the positioning precision in both axes deteriorates
Solution Approach 1:
The positioning device is segmented into two independent positioning units, each responsible for one axis. The first positioning unit adjusts the scraper mirror along the first axis, while the second positioning unit adjusts along the second axis. This segmentation allows each unit to be optimized for its specific axis, achieving high positioning precision in both directions without requiring an overly complex integrated mechanism.
Solution Approach 2:
The patent transitions from a single-axis positioning approach to a two-dimensional positioning system by introducing a second positioning unit perpendicular to the first. This dimensional expansion enables precise control of the scraper mirror in both x and y directions, achieving accurate beam path positioning that cannot be obtained with a single positioning mechanism.
2Productivity
If the scraper mirror is positioned exactly in the beam path, then the laser radiation coupling efficiency is improved, but the adjustment complexity increases
Solution Approach 1:
The patent replaces complex manual adjustment mechanisms with automated positioning drives (first positioning drive and second positioning drive). These drives mechanically move the scraper mirror along defined axes, substituting intricate manual alignment procedures with controlled mechanical translation, thereby achieving high coupling efficiency while keeping the adjustment system manageable.
3Adaptability or versatility
If rotation about two mutually perpendicular axes is used to position the mirror holder, then the positioning flexibility is improved, but the positioning accuracy in the beam path deteriorates
Solution Approach 1:
The patent transitions from a static rotation-based positioning system to a dynamic translation-based system. Instead of rotating the mirror holder about perpendicular axes, the scraper mirror is dynamically positioned along two perpendicular axes through linear translation. This dynamic approach allows for more precise control of the mirror's position in the beam path while maintaining the flexibility to adjust both horizontal and vertical positions.
Data Source
AI summary
A beam guide guides a laser beam on a device for extreme ultraviolet lithography. The beam guide has a scraper mirror for coupling out laser radiation and a positioning device for positioning the scraper mirror in a positioning plane defined by first and second positioning axes. The positioning device contains first and second positioning units assigned to the first and second positioning axes, respectively. The first positioning unit has a first linear guide and a first positioning drive. By the first positioning drive, the scraper mirror is moved together with the mirror-side guide element of the first linear guide relative to the mirror-remote guide element of the first linear guide along the first positioning axis into a target position. The second positioning unit has a second linear guide and a second positioning drive, the second linear guide has a mirror-side guide element and a mirror-remote guide element.