Screen Control Program for Semiconductor Apparatus
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Solution Overview
Problem
In semiconductor manufacturing, the management of semiconductor manufacturing apparatuses involves multiple tasks and personnel, leading to user-unfriendliness due to differing information needs and screen requirements for process adjustments, maintenance, and optimization, which complicates the manageability of recipe data and operational visibility.
Innovation Solution
A non-transitory computer-readable storage medium with a screen control program that dynamically adjusts the display area of a display screen based on its orientation, dividing it into a main screen for monitoring operational status and a work area for operation images, allowing users to operate and monitor processes more intuitively.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the display screen is divided into multiple areas for different management matters, then the user-friendliness and operational visibility are improved, but the device complexity increases
Solution Approach 1:
The display screen is segmented into multiple functional areas including a first display area for process adjustment information, a second display area for maintenance information, and a third display area for overall optimization information. This segmentation allows different users to access relevant information simultaneously without switching screens, improving ease of operation while maintaining manageable complexity through automated area assignment based on user roles and screen resolution.
2Loss of information
If multiple management matters are displayed simultaneously, then the manageability of recipe data and operational visibility are improved, but the loss of information increases due to screen space constraints
Solution Approach 1:
The invention utilizes the vertical dimension of the display screen by arranging multiple display areas in a vertical layout. The first, second, and third display areas are positioned at different vertical locations, allowing comprehensive information presentation without horizontal clutter. This dimensional arrangement prevents information loss while maintaining efficient manageability of recipe data and operational visibility.
Solution Approach 2:
Each display area is assigned specific quality characteristics appropriate to its function. The first display area for process adjustment uses detailed parameter displays, the second area for maintenance uses alert-based information presentation, and the third area for overall optimization uses summary statistics. This localized quality optimization ensures each type of information is presented in the most effective format, preventing information loss while enhancing manageability.
3Ease of operation
If the display area is determined based on screen resolution orientation, then the ease of operation is improved, but the manufacturing precision of the display layout increases
Solution Approach 1:
The display layout is made dynamic by automatically determining the display area configuration based on the detected screen resolution orientation. When a vertical screen is detected, the system dynamically assigns the first display area to the upper portion and the second display area to the lower portion. This dynamic adaptation improves ease of operation across different devices while the automated detection and assignment process maintains manufacturing precision by eliminating manual layout configuration errors.
Data Source
AI summary
A non-transitory computer-readable storage medium storing a program of screen control capable of improving the user-friendliness with respect to a semiconductor manufacturing apparatus is disclosed. The program of screen control causes a computer to perform operation of: judging whether or not a vertical screen resolution of a display screen is larger than a horizontal screen resolution of the display screen; and dividing a display area of the display screen into a main screen display area for displaying a monitoring image with respect to an operational status of a processing unit and a work area for displaying an operation image with respect to an operation of the processing unit when the vertical screen resolution is larger than the horizontal screen resolution.