Screen Filtration Layout for Cutting Chip Discharge Liquid
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Solution Overview
Problem
Conventional filtration systems in semiconductor processing chambers are prone to clogging due to high volumes of cutting chips, leading to frequent maintenance and poor productivity, as they fail to effectively collect suspended matter and maintain the quality of the filtered discharge liquid.
Innovation Solution
A processing discharge liquid filtration device comprising a first tank, a first tank pump, a screen filter for primary filtration, a cutting chip recovery container, and optional features like discharge liquid agitation and pump cooling, which automatically recovers cutting chips and maintains the quality of the filtered liquid by suspending chips for improved filtration performance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a filter is directly provided with the precipitation tank, then cutting chips can be filtered, but the filter is clogged with large amounts of cutting chips and needs frequent maintenance
Solution Approach 1:
The filtration system is segmented into two distinct stages: a precipitation tank for initial settling of large cutting chips, and a separate filtration unit with a filter for removing finer particles. This segmentation prevents the filter from being overwhelmed by large chip volumes, reducing clogging and maintenance frequency while maintaining continuous production capability.
Solution Approach 2:
The precipitation tank performs preliminary action by allowing cutting chips to settle and separate from the discharge liquid before the liquid reaches the filter. This pre-treatment removes the bulk of solid particles that would otherwise clog the filter, enabling the filter to operate reliably for longer periods without maintenance interruption.
2Reliability
If a Y strainer drain trap is used for the drain line, then some filtration is provided, but the drain line is immediately clogged and needs frequent maintenance
Solution Approach 1:
The drainage system is segmented into a Y strainer for initial coarse filtration and a subsequent main filter for fine filtration. This multi-stage segmentation allows each component to handle specific particle sizes, preventing the drain line from immediate clogging while maintaining continuous production capability.
Solution Approach 2:
The Y strainer performs preliminary action by capturing large cutting chips and debris before they can clog the drain line. This pre-filtration protects the downstream drainage system and maintains reliable operation without frequent maintenance interruptions.
3Device complexity
If the precipitation tank has no suspended matter collection effect, then the structure is simple, but lightweight resin flows out to the drain line and clogs it
Solution Approach 1:
The system is segmented into a precipitation tank for heavy particle settling and a separate filtration unit with a filter for capturing lightweight suspended matter like resin. This segmentation ensures that both heavy and light particles are removed through appropriate mechanisms, preventing drain line clogging while maintaining manageable structural complexity.
Solution Approach 2:
The filter acts as an intermediary component between the precipitation tank and the drain line. It captures lightweight suspended matter that the precipitation tank cannot remove, preventing these particles from reaching and clogging the drain line, thus ensuring drain line reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system enhances filtration capacity, reduces the frequency of filter maintenance, and maintains the quality of the filtered discharge liquid by automatically recovering cutting chips and agitating the liquid to suspend particles, thereby improving productivity and extending filter lifespan.
Implementation Method 1
a screen filter for primary filtration processing that recovers the cutting chips mixed into the discharge liquid
Implementation Method 2
discharge liquid agitation means for returning a part of the discharge liquid pumped up by the first tank pump into the discharge liquid in the first tank to agitate the discharge liquid in the first tank
Implementation Method 3
a first tank pump that pumps up the discharge liquid stored in the first tank
Data Source
AI summary
A processing discharge liquid filtration device enhances filtration capacity for filtering a discharge liquid discharged from a processing device. The processing discharge liquid filtration device includes a dirty tank that stores a discharge liquid containing cutting chips, a dirty tank pump that pumps the discharge liquid stored in the dirty tank to a screen filter for primary filtration processing that recovers the cutting chips mixed into the discharge liquid, and a cutting chip recovery container that contains the cutting chips recovered by the screen filter. The processing discharge liquid filtration device eliminates the time and effort to replace the filtration member or filter and keeps the quality of the filtered discharge liquid constant.