Scrubber Inlet Blocking Sheet Prevents Clogging
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Solution Overview
Problem
In semiconductor manufacturing, scrubber inlets clog due to reaction products formed between cleaning solutions and contaminants, leading to increased downtime and reduced production.
Innovation Solution
The inlet design includes a transport duct with a blocking sheet and nozzles to prevent reaction product buildup, using a polytetrafluoroethylene blocking sheet with a lower coefficient of friction and strategically positioned spray nozzles to direct cleaning solutions and inert gases, preventing direct contact and reducing reaction product deposition.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If cleaning solution is sprayed into the transport duct to eliminate contaminants, then the harmful components are removed from waste gas, but reaction products are produced that clog the inlet
Solution Approach 1:
A blocking sheet is introduced as an intermediary element between the cleaning solution spray nozzles and the transport duct wall. The blocking sheet intercepts the cleaning solution before it contacts the duct wall, preventing the formation of reaction products at the critical interface. The blocking sheet is made of PTFE material that is resistant to the cleaning solution and has low friction properties to prevent adhesion of reaction products.
Solution Approach 2:
The transport duct interior is segmented into different functional zones using the blocking sheet. The blocking sheet creates a separated region where cleaning solution is directed away from the duct wall, effectively dividing the space into a cleaning solution injection zone and a protected transport zone. This segmentation prevents unwanted chemical reactions in specific areas while maintaining overall system function.
2Reliability
If the inlet is replaced frequently to prevent clogging, then the reacting system can maintain continuous operation, but the downtime for replacement increases
Solution Approach 1:
The blocking sheet is pre-installed in the transport duct before operation begins. This preliminary placement of the protective element prevents reaction product formation from occurring in the first place, rather than requiring corrective maintenance after clogging occurs. The blocking sheet remains in place during operation, continuously preventing the clogging mechanism before it can initiate.
Solution Approach 2:
The problematic interaction between cleaning solution and duct wall is extracted or removed from the system by introducing the blocking sheet as a sacrificial intermediate layer. The blocking sheet absorbs the harmful interaction, allowing the main transport duct to remain clean and functional for extended periods. This extraction of the clogging mechanism enables longer operational cycles between maintenance activities.
3Reliability
If the blocking sheet is positioned to block cleaning solution from the transport duct interior, then reaction product deposition is reduced, but the cleaning solution effectiveness may be compromised
Solution Approach 1:
The blocking sheet is strategically positioned at specific locations within the transport duct where cleaning solution would otherwise contact the duct wall and form reaction products. The blocking sheet does not completely obstruct the cleaning solution flow but rather redirects it locally to avoid critical areas. This localized intervention maintains overall cleaning effectiveness while preventing deposition in specific problematic zones.
Solution Approach 2:
The blocking sheet is made from PTFE material with specific physical parameters including low friction coefficient and chemical inertness to the cleaning solution. These material parameter changes ensure that the blocking sheet itself does not adhere to reaction products and can be easily removed or replaced. The material properties are selected to maintain cleaning solution effectiveness while preventing the clogging problem.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design extends the replacement period of the inlet, reduces downtime, and increases production by minimizing clogging and allowing continuous operation.
Implementation Method 1
a blocking sheet disposed in the transport duct to be spaced apart from an inner wall of the transport duct, wherein the cleaning solution sprayed from the first nozzle is blocked from being introduced into one region of the transport duct positioned inside the blocking sheet
Implementation Method 2
at least one first nozzle connected to one region of a lateral surface of the body and adapted to spray a cleaning solution into the transport duct
Implementation Method 3
The blocking sheet may be formed of a resin material having a coefficient of friction less than a coefficient of friction of the body. The blocking sheet may be formed of polytetrafluoroethylene.
Data Source
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AI summary
An inlet and a reacting system having the same are disclosed. The inlet includes a body provided therein with a transport duct allowing a fluid to flow therethrough, at least one first nozzle connected to one region of a lateral surface of the body and adapted to spray a cleaning solution into the transport duct, and a blocking sheet disposed in the transport duct to be spaced apart from an inner wall of the transport duct, wherein the cleaning solution sprayed from the first nozzle is blocked from being introduced into one region of the transport duct positioned inside the blocking sheet.