Scrubber System With Inverted Pump To Prevent Pipe Clogging
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Manufacturing devices for electronic devices, such as semiconductor and display devices, emit harmful gases like perfluoro-compounds during the manufacturing process, which require effective purification to prevent environmental and health hazards.
Innovation Solution
A scrubber system comprising a lower body with a chiffonier-configured scrubber unit, including a reactor and a wet treatment performer, and an upper body with a pump that injects harmful gases into the reactor for primary treatment and then secondary treatment with water to purify and discharge the gases, preventing clogging of gas supply pipes by locating the pump above the scrubber.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If the pump is located below the scrubber, then the gas supply pipe is easier to install, but the pipe becomes clogged with condensed water and debris
Solution Approach 1:
The pump is inverted from the conventional below-scrubber position to an above-scrubber position. This inversion prevents condensed water and debris from entering the gas supply pipe, eliminating clogging while maintaining installation feasibility through the integrated upper body structure
2Device complexity
If a single scrubber is used, then the device complexity is reduced, but the purification capacity is insufficient for multiple manufacturing devices
Solution Approach 1:
The lower body is segmented into multiple independent scrubber units (first scrubber with first reactor, second scrubber with second reactor), each capable of handling gas from separate manufacturing devices. This segmentation enables scalable purification capacity while maintaining modular simplicity
Solution Approach 2:
The scrubber system is designed with multi-functionality to handle multiple types of harmful gases from different manufacturing devices simultaneously. Each scrubber unit can independently process different gas streams, making the system universally applicable to various semiconductor manufacturing processes
3Reliability
If the pump is located in the upper body, then pipe clogging is prevented, but the overall system height increases
Solution Approach 1:
The pump is nested within the upper body structure, and the scrubber units are nested within the lower body structure. This nested arrangement integrates the pump height into the existing upper body footprint rather than adding external height, minimizing the overall system height increase while maintaining the above-scrubber pump configuration
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The scrubber system efficiently purifies harmful gases by combining primary burning or thermal decomposition with secondary wet treatment, effectively removing pollutants and preventing pipe clogging, thereby ensuring safe gas discharge and maintaining operational efficiency.
Implementation Method 1
a pump located in the upper body for pumping a harmful gas from a manufacturing device into the reactor
Implementation Method 2
the scrubber purifying the harmful gas and discharging a purified gas outside of the upper body
Implementation Method 3
combining primary burning or thermal decomposition with secondary wet treatment
Implementation Method 4
secondary treatment with water to purify and discharge the gases
Data Source
AI summary
A scrubber system having a lower body, a scrubber located in the lower body, the scrubber having a reactor and a wet treatment performer connected to the reactor, the scrubber being configured in the form of a chiffonier, an upper body located on the lower body, and a pump located in the upper body, wherein the pump pumps a harmful gas from a manufacturing device into the reactor, and the scrubber purifies the harmful gas and discharges a purified gas to the outside of the upper body.