Wet Scrubber Washing Segment for Fine Particle Removal

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Solution Overview

Problem

Conventional wet scrubbers exhibit low efficiency for fine particles with diameters less than 1 μm, leading to particle deposition in waste gas lines and potential environmental release.

Innovation Solution

The improved washing segment employs structured packing that is at least 50% shorter, combined with a spray scrubber to generate fine drops for particle bonding, and a woven fabric to separate fine particles without washing liquid buildup.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If structured packing with larger specific surface area and shorter free path lengths is used, then particle separation efficiency is improved, but pressure loss increases and washing liquid buildup occurs

Engineering Contradiction:
Improveparticle separation efficiencyVSAvoidpressure loss
Core Design Contradiction:
Manufacturing precisionVSStress or pressure

Solution Approach 1:

The washing segment is divided into multiple sections with different packing densities. The lower section has higher packing density for effective particle separation, while the upper section has lower packing density to reduce pressure loss and prevent liquid buildup. This segmentation allows each zone to optimize for its specific function.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the structured packing are designed with different properties. The lower region uses denser packing material to maximize separation efficiency where gas-liquid contact is most effective, while the upper region uses sparser packing to minimize pressure drop and facilitate liquid drainage.

Inventive Principle:
Principle #3Local quality

2Manufacturing precision

If structured packing with larger specific surface area is used, then particle separation efficiency is improved, but washing liquid buildup increases

Engineering Contradiction:
Improveparticle separation efficiencyVSAvoidwashing liquid buildup
Core Design Contradiction:
Manufacturing precisionVSQuantity of substance

Solution Approach 1:

The packing is segmented vertically with the lower portion having higher surface area for separation and the upper portion having lower surface area to facilitate liquid drainage and prevent accumulation.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The solution addresses liquid buildup by considering the vertical dimension of liquid flow. The packing density varies with height to create a gradient that promotes liquid drainage upward and outward, preventing pooling in the lower regions where separation occurs.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Manufacturing precision

If packing density is increased, then particle separation efficiency is improved, but pressure loss along the washing segment increases

Engineering Contradiction:
Improveparticle separation efficiencyVSAvoidpressure loss
Core Design Contradiction:
Manufacturing precisionVSStress or pressure

Solution Approach 1:

The packing density is segmented along the vertical axis, with high density in the lower section for separation and low density in the upper section for pressure reduction.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The packing density parameter is changed as a function of height. The system transitions from high density near the bottom to low density near the top, optimizing the balance between separation efficiency and pressure drop.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration achieves a higher efficiency in separating fine and ultrafine particles from waste gas streams, minimizing pressure loss and washing liquid buildup, while maintaining effective gas cleaning.

Implementation Method 1

combined with a spray scrubber to generate fine drops for particle bonding

Methodology Applied
Scientific EffectAtomization:

Implementation Method 2

a woven fabric to separate fine particles without washing liquid buildup

Methodology Applied
Scientific EffectFiltration: Filter (physical)

Implementation Method 3

structured packing that is at least 50% shorter, combined with a spray scrubber to generate fine drops for particle bonding

Methodology Applied
Scientific EffectAbsorption: Absorption (physical)

Data Source

PatentUS12303826B2Device and method for cleaning a gas stream
Publication Date: 2025.05.20 DAS ENVIRONMENTAL EXPERT
  • US12303826B2 patent drawing
  • US12303826B2 patent drawing
  • US12303826B2 patent drawing

AI summary

A device, such as a wet scrubber for cleaning a stream of gas by removing gaseous, liquid and solid impurities, has a gas inlet and a gas outlet. At the gas inlet there is a first structured packing. A spray-scrubber area with atomizing nozzles is provided above the first structured packing. A first demister is provided for separating larger drops above the spray-scrubber area. A woven fabric is above the first demister, and spray nozzles are arranged around this woven fabric to spray washing liquid in the direction of the gas stream onto the surface of the woven fabric. A final demister is located above the woven fabric and has a demister rinsing apparatus. The device may be used to dispose of industrial waste gases encountered in the semiconductor industry, particularly for the disposal of waste gases stemming from CVD processes in microelectronics production.