Semiconductor Exhaust Scrubber Water Control by Active Chamber Load
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Solution Overview
Problem
Existing scrubber apparatuses in semiconductor production lines consume excessive amounts of treated water regardless of the number of active processing chambers, leading to inefficiencies in pollutant treatment.
Innovation Solution
A scrubber apparatus that adjusts the amount of treated water used based on the number of active processing chambers, using a controller to dynamically control the water supply through spray nozzles, thereby optimizing water usage without compromising treatment efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If treated water is continuously supplied to operate the scrubber apparatus, then pollutant treatment efficiency is maintained, but treated water consumption increases excessively
Solution Approach 1:
The scrubber apparatus dynamically adjusts the amount of treated water supplied based on the number of active processing chambers. The controller receives signals from processing chambers and modulates the water supply accordingly, transitioning from static continuous supply to dynamic demand-based supply, thereby reducing water consumption while maintaining treatment efficiency during partial operation
Solution Approach 2:
The system changes the parameter of water supply amount based on operational conditions. When processing chambers are active, treated water is supplied at higher rates; when chambers are inactive, water supply is reduced or stopped. This parameter adjustment resolves the contradiction by adapting water consumption to actual treatment needs
2Loss of substance
If the amount of treated water is reduced to decrease water consumption, then treated water usage decreases, but pollutant treatment efficiency may be compromised
Solution Approach 1:
The controller receives feedback signals from the processing chambers indicating their operational status. Based on this feedback, the controller adjusts the treated water supply in real-time, ensuring that water consumption is reduced only when treatment demand is low, while maintaining adequate water supply when pollutant treatment is required, thus preserving treatment efficiency
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Reduces treated water consumption by up to 43% while maintaining pollutant removal efficiency at similar levels, improving operational efficiency and reducing costs.
Implementation Method 1
a plurality of first spray nozzles spraying treated water into the exhaust gas drawn by the air intake unit
Implementation Method 2
a plurality of second spray nozzles spraying the treated water onto the exhaust gas having passed through the first scrubber stage
Data Source
AI summary
A scrubber apparatus includes a chamber, an air intake unit connected to a semiconductor processing apparatus including a plurality of processing chambers and intaking exhaust gas discharged from the plurality of processing chambers into a processing space inside the chamber, a treated water supply pipe installed in the processing space, connected to a plurality of spray nozzles spraying treated water, and supplying the treated water to the processing space, a wastewater discharge unit discharging wastewater in which the exhaust gas is dissolved by the treated water from the processing space, a gas discharge unit connected to the chamber and discharging residual gas, and a controller communicatively connected to the semiconductor processing apparatus and adjusting an amount of the treated water supplied to the processing space based on the number of active processing chambers in progress among the plurality of processing chambers.