Seal Belt Support in Linear Motion Mechanisms for Particle Control

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Solution Overview

Problem

Conventional linearly moving mechanisms in substrate processing apparatuses for semiconductor manufacturing suffer from particle scattering due to seal belt deformation, leading to reduced yield and increased operational costs.

Innovation Solution

A linearly moving mechanism with a seal belt and deformation suppressing members, including enclosing members and a gas discharge system, to maintain seal integrity and suppress particle scattering.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-affected harmful factors

If a seal belt is used to close the opening in the case body, then particle scattering is suppressed, but the seal belt deforms due to pressure differential when the case body is evacuated, reducing sealing effectiveness

Engineering Contradiction:

Improveparticle scatteringVSAvoidseal belt deformation

Core Design Contradiction:

Object-affected harmful factorsVSStability of the object's composition

Solution Approach 1:

The seal belt is divided into multiple sections with different structural characteristics. The first section has a first thickness and the second section has a second thickness different from the first, allowing each section to respond differently to pressure differentials and maintain sealing effectiveness throughout the evacuation process.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Different portions of the seal belt are given different structural properties through varying thickness. The first section is positioned to handle specific pressure conditions while the second section handles different pressure conditions, optimizing the sealing performance at each location along the seal belt.

Inventive Principle:

Principle #3Local quality

2Object-affected harmful factors

If the fan rotation speed is increased to suppress particle scattering, then particle control improves, but operational costs and energy consumption increase

Engineering Contradiction:

Improveparticle scatteringVSAvoidfan energy consumption

Core Design Contradiction:

Object-affected harmful factorsVSUse of energy by moving object

Solution Approach 1:

The patent converts the harmful effect of pressure differential that causes seal belt deformation into a beneficial feature by designing a multi-section seal belt that utilizes the pressure differential to maintain optimal sealing contact, thereby reducing the need for high fan speeds and associated energy consumption.

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

Solution Approach 2:

The seal belt structure is modified by changing the thickness parameter across different sections, creating a gradient structure that optimizes sealing performance under varying pressure conditions, allowing for more efficient particle control with lower energy input.

Inventive Principle:

Principle #35Parameter changes

3Reliability

If the seal belt is positioned closer to the opening edge to improve sealing, then sealing effectiveness increases, but the seal belt deformation is exacerbated by pressure differential

Engineering Contradiction:

Improvesealing effectivenessVSAvoidseal belt deformation

Core Design Contradiction:

ReliabilityVSStability of the object's composition

Solution Approach 1:

The seal belt is segmented into at least two sections along its length, with each section having different thickness characteristics. This segmentation allows the seal belt to be positioned effectively near the opening edge while the varying thickness compensates for deformation caused by pressure differentials.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Different sections of the seal belt are assigned different thickness properties to optimize their performance at specific locations. The first section has a first thickness and the second section has a second thickness, creating local quality variations that maintain sealing effectiveness while resisting deformation.

Inventive Principle:

Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Effectively reduces particle scattering, enhances yield, and lowers operational costs by maintaining seal integrity and reducing fan rotation speed.

Implementation Method 1

a suctioning member provided at the case body, and configured to firmly attach, by sucking the first surface side of the both end portions of the seal belt connected to the internal moving body

Methodology Applied

Scientific EffectSuction: Suction

Data Source

PatentUS12557591B2Linearly moving mechanism and method of suppressing particle scattering

Publication Date: 2026.02.17 TOKYO ELECTRON LTD

AI summary

A linearly moving mechanism includes an internal moving body provided within a case body and configured to be moved in a linear direction, the internal moving body being configured to move an external moving body connected to a connection member protruded from the case body through an opening formed at the case body; a seal belt extending in the linear direction and provided within the case body to close the opening, a first surface side of both end portions of the seal belt in a widthwise direction thereof facing an edge portion of the opening while being spaced apart therefrom; and a deformation suppressing member provided to face a second surface side of the both end portions to suppress deformation of the seal belt, the seal belt being connected to the internal moving body to be moved along with a movement of the internal moving body.