Seal Insertion Tool for Tight-Packed Fluid Delivery Modules
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Solution Overview
Problem
The increasing complexity and density of flow control devices in semiconductor and other industrial processes make maintenance and seal installation challenging due to tight packaging and space constraints, requiring improved methods and tools for efficient assembly and seal replacement.
Innovation Solution
A seal insertion tool is developed to efficiently install or replace annular seals in fluid delivery modules, which includes a body with fasteners for coupling to the module, an end effector for retaining and positioning the seal, and an actuator to lower the seal into a groove, allowing for precise and leak-free assembly while minimizing the risk of damage to components.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If component size is decreased and packaging is made tighter to improve flow control technology, then device density and integration are improved, but maintenance and seal installation become more difficult due to space constraints
Solution Approach 1:
The flow control device is divided into modular components including a replaceable seal assembly, substrate block, and flow component. This segmentation allows the seal to be independently replaced without disassembling the entire device, making maintenance feasible in tight packaging configurations.
Solution Approach 2:
A seal insertion tool serves as an intermediary device that facilitates seal installation in confined spaces. The tool includes a body, end effector, and actuator mechanism that can access and install seals through limited openings without requiring direct manual access to the seal location.
2Adaptability or versatility
If more components are assembled in tight quarters to improve flow control functionality, then device capability is improved, but seal leakage risk increases due to assembly difficulty
Solution Approach 1:
The seal is pre-loaded into the end effector before insertion. The end effector is designed with alignment features that ensure the seal is positioned correctly in the annular groove before final seating, preventing misalignment and leakage. The tool fasteners are pre-positioned to align with anchors on the substrate block.
Solution Approach 2:
Manual seal installation is replaced with an actuated mechanical system. The actuator translates rotational motion into linear motion to press the seal into the groove with controlled force, ensuring consistent sealing without the variability and potential for error associated with manual compression.
3Device complexity
If manual seal installation methods are used in tight spaces, then device complexity is minimized, but installation speed and precision are reduced
Solution Approach 1:
The end effector is designed with movable components including the actuator-driven plunger mechanism. The tool transitions from a static assembly state to an active installation state through actuator engagement, enabling rapid seal compression without requiring complex multi-step manual operations.
Solution Approach 2:
The seal insertion tool is designed to be self-aligning through complementary geometric features between the tool body and substrate block. The fasteners automatically align with anchors, and the end effector self-centers on the seal, reducing the need for precise manual positioning and enabling faster installation.
Data Source
AI summary
Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication. These apparatuses for controlling fluid flow require a variety of fluid flow components which are tightly packaged within the apparatuses for controlling flow. Servicing the apparatuses requires specialized equipment and methods which enable installation of seals in close quarters in apparatuses which are installed in the field. Seal insertion tools may be used to facilitate installation of the seals to permit efficient assembly of fluid flow components into apparatus for controlling flow.