Seal Cleaning Pad Holder With Backflush Fluid Delivery
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Solution Overview
Problem
Conventional seal cleaning apparatuses in semiconductor manufacturing waste cleaning solution and cause ineffective cleaning and increased wear due to direct application of cleaning solution on seals, leading to reduced lifespan and contamination of subsequently processed wafers.
Innovation Solution
The introduction of pad holders that deliver cleaning solution directly to the cleaning pad, enhancing saturation and lubrication, thereby improving cleaning effectiveness and reducing wear on both the seal and cleaning pad.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If cleaning solution is applied directly on seals, then cleaning effectiveness is improved, but cleaning solution waste increases and wear increases
Solution Approach 1:
The patent introduces a cleaning pad as an intermediary between the cleaning solution and the seal. The pad holder delivers cleaning solution directly to the pad, which then transfers it to the seal during cleaning operations. This intermediary approach ensures controlled application of cleaning solution, improving effectiveness while reducing waste and wear compared to direct application methods.
2Reliability
If cleaning solution is applied directly on seals, then cleaning effectiveness is improved, but wear on seal and cleaning pad increases
Solution Approach 1:
The patent applies preliminary action by delivering cleaning solution to the cleaning pad before it contacts the seal. The pad holder saturates the pad with cleaning solution in advance, ensuring the pad is fully prepared for effective cleaning. This preliminary saturation reduces the need for repeated heavy application, thereby reducing wear on both the seal and cleaning pad while maintaining cleaning effectiveness.
3Reliability
If cleaning solution is applied directly on seals, then cleaning effectiveness is improved, but cleaning solution waste increases
Solution Approach 1:
The cleaning pad serves as an intermediary that controls the transfer of cleaning solution from the pad holder to the seal. This intermediary system ensures that cleaning solution is applied only where needed and in controlled amounts, preventing excessive waste while maintaining effective cleaning performance.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances cleaning efficiency, prolongs the operational life of seals and cleaning pads, and reduces waste by ensuring better saturation and lubrication of the cleaning interface.
Implementation Method 1
delivering a cleaning solution through a body of the pad holder to a rear surface of the cleaning pad... enhancing saturation and lubrication
Implementation Method 2
enhancing saturation and lubrication, thereby improving cleaning effectiveness and reducing wear on both the seal and cleaning pad
Data Source
AI summary
Exemplary seal cleaning apparatuses may include at least one support that is configured to receive a seal. The apparatuses may include a tool arm that is positionable within an interior of the seal. The apparatuses may include a pad holder that is rotatably coupled with the tool arm. The pad holder may include a body having a first end and a second end. The first end may define a channel that is configured to receive a cleaning pad. The body may define an aperture that extends from the second end through the channel. The pad holder may include a fluid fitting coupled with the aperture at the second end of the body. The apparatuses may include a cleaning fluid source that is fluidly coupled with the fluid fitting.