Seal Retainer Assembly for Hermetic Sealing in Tight Flow Control Spaces
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Solution Overview
Problem
The challenge of efficiently assembling and maintaining flow control components in tight spaces within semiconductor fabrication apparatuses has become increasingly difficult due to the miniaturization and denser packaging requirements in semiconductor chip fabrication, necessitating improved methods and equipment for installing seals and components.
Innovation Solution
A seal retainer is used to facilitate the assembly of fluid flow components by forming a seal assembly, aligning it with a seal cavity, and then partially fastening it to an apparatus, followed by retracting the retainer to ensure a hermetic seal, allowing for efficient installation and maintenance of flow control components.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If components are miniaturized and packaging is tightened to improve device density, then productivity and space utilization are improved, but assembly and maintenance become more difficult and time-consuming
Solution Approach 1:
The seal is pre-installed onto the component in a separate preparation step before the component is installed into the apparatus. This preliminary action allows the seal to be positioned and secured in advance, making the subsequent installation process simpler and faster despite tight packaging constraints
Solution Approach 2:
The assembly process is divided into separate steps: seal preparation, component installation, and seal engagement. The seal retainer acts as a temporary holding structure that facilitates this segmented approach, allowing each step to be performed independently in the constrained space
2Area of stationary object
If components are miniaturized and packaging is tightened, then space utilization is improved, but maintenance time increases
Solution Approach 1:
The seal is pre-installed onto the component before the component is placed into the apparatus. This preliminary preparation reduces the complexity and time required for maintenance operations in the tightly packaged final assembly
Solution Approach 2:
The seal retainer serves as a temporary intermediary tool that facilitates seal installation in tight spaces. It holds the seal in position during assembly and can be removed afterward, enabling efficient maintenance without requiring complex tools or procedures in the constrained environment
3Productivity
If existing assembly methods are used in tight spaces, then device density is maintained, but seal installation reliability decreases
Solution Approach 1:
The seal retainer acts as an intermediary tool that provides a stable platform for installing the seal in tight quarters. It ensures proper positioning and secure attachment of the seal to the component, improving installation reliability without compromising device density
Solution Approach 2:
The seal retainer is designed to work with the component's existing features (such as alignment features or cavities) to automatically position and secure the seal during installation, reducing the need for complex external tooling and improving reliability through self-aligning mechanisms
Data Source
AI summary
Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication. These apparatuses for controlling fluid flow require a variety of fluid flow components which are tightly packaged within the apparatuses for controlling flow. Servicing the apparatuses requires specialized equipment and methods which enable installation of seals in close quarters in apparatuses which are installed in the field. Seal retainers may be used to retain the seals during assembly of fluid flow components into apparatus for controlling flow.