Seal Ring Assembly With Expansion Spaces to Prevent Thermal Cracking
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Solution Overview
Problem
The existing seal ring designs in substrate processing apparatuses are prone to cracking due to thermal expansion, which affects the airtightness and reliability of the joint portions between pipes.
Innovation Solution
A seal assembly comprising a seal ring sandwiched between an inner ring and an outer ring, where the inner ring restricts movement towards the inner peripheral side and the outer ring restricts movement towards the outer peripheral side, with circumferential spaces provided for thermal expansion, reducing the risk of cracking.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the seal ring is tightly fixed between flanges to ensure airtightness, then sealing performance is improved, but thermal expansion causes seal ring cracking
Solution Approach 1:
The space between the inner ring and outer ring is divided into multiple circumferential spaces (first space and second space) to segment the thermal expansion accommodation, allowing controlled distribution of expansion forces and preventing concentrated stress that causes cracking
Solution Approach 2:
The seal ring is nested between the inner ring and outer ring, with the inner ring having an inner peripheral surface and the outer ring having an outer peripheral surface, creating a nested structure that provides radial constraint while accommodating thermal expansion through the circumferential spaces
2Manufacturing precision
If the seal ring is constrained radially to prevent movement, then sealing position is maintained, but thermal expansion is restricted causing stress concentration
Solution Approach 1:
The inner ring and outer ring provide localized radial constraint at their contact surfaces with the seal ring, while the circumferential spaces provide localized volume for thermal expansion, creating a structure with different local properties (constraint vs. expansion accommodation) in different spatial regions
Solution Approach 2:
The circumferential spaces change the physical parameters of the seal ring assembly by providing additional volume (approximately 10% of the seal ring volume) that can be occupied by thermally expanded material, thereby changing the stress distribution and preventing stress concentration
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively reduces seal ring cracking, maintains airtightness, and allows for higher temperature operations, improving the reliability and productivity of substrate processing.
Implementation Method 1
an inner ring that is disposed on an inner peripheral side of the seal ring and restricts movement or deformation of the seal ring toward the inner peripheral side
Implementation Method 2
an outer ring that is disposed on an outer peripheral side of the seal ring and restricts movement or deformation of the seal ring toward the outer peripheral side
Data Source
AI summary
Provided is a technique including: a seal ring that seals flanges of a joint; an inner ring that is disposed on an inner peripheral side of the seal ring and restricts movement or deformation of the seal ring toward the inner peripheral side; and an outer ring that is disposed on an outer peripheral side of the seal ring and restricts movement or deformation of the seal ring toward the outer peripheral side, in which a plurality of spaces for receiving thermal expansion of a volume of the seal ring is provided in a circumferential direction between the inner ring and the outer ring.