Seal Ring Retention Structure for Faster Semiconductor Fluid Assembly
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing fluid delivery systems for semiconductor chip fabrication require faster assembly and service due to increasing performance demands, and there is a need for improved seals and reduced service time to enhance process performance.
Innovation Solution
A fluid delivery system comprising a substrate block, an active component, and a seal ring, where the seal ring has an interior sleeve and an outer ring forming annular grooves, and a seal retention feature on the outer surface, allowing for efficient sealing and assembly.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If traditional sealing assemblies are used in fluid delivery systems, then fluid-tight connections are provided, but assembly and service time increase
Solution Approach 1:
The patent combines the seal member, retaining ring, and groove structure into an integrated sealing assembly that nests within a single seal channel. The seal member is retained by the retaining ring within the seal channel, eliminating the need for separate sealing components and reducing assembly steps while maintaining fluid-tight connections.
Solution Approach 2:
The sealing system is segmented into distinct functional elements: the seal member (O-ring or elastomeric seal), the retaining ring (spring-loaded or deformable), and the seal channel with groove. This segmentation allows each component to be optimized independently and facilitates quicker assembly by allowing the seal member to be pre-installed in the groove before final assembly.
2Productivity
If higher density packaging is implemented to meet performance demands, then system performance improves, but service and assembly complexity increases
Solution Approach 1:
The seal channel design serves multiple functions: it provides the sealing pathway, contains the groove for the seal member, and incorporates the retaining ring mechanism. This multi-functionality reduces the number of separate components needed in high-density packaging while maintaining serviceability through the standardized seal channel interface.
3Reliability
If more seals are added to provide better sealing, then sealing performance improves, but assembly time increases
Solution Approach 1:
Multiple sealing functions are merged into a single seal member that operates within the seal channel. The spring-loaded or deformable retaining ring provides continuous pressure to maintain the seal, eliminating the need for multiple separate seal components while achieving reliable fluid-tight connections.
Data Source
AI summary
Fluid delivery systems are important component assemblies used for semiconductor fabrication. These fluid delivery systems rely on assemblies of components, requiring seals which must be installed and replaced during assembly and maintenance of the fluid delivery systems. Seals may be arranged as seal rings which engage substrate blocks or active components, the seal rings having seal retention features which aid in assembly. These seal retention features may increase the retention force of the seal in a seal cavity or may reduce the force required to retain the seal. In other arrangements, the seal cavities of the substrate blocks or active components may incorporate seal retention features.