Connected-Part Seal Taper Structure for Flow Passage Stability
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Solution Overview
Problem
Existing connected-part seal structures in semiconductor manufacturing devices face issues with deformation of flow passages due to uneven pressure-contact forces, leading to reduced sealing strength and potential leakage.
Innovation Solution
A connected-part seal structure with a seal member featuring an inner pressure-contact tapered part with a smaller taper angle than the inner tapered part, and an outer pressure-contact tapered part with a smaller taper angle than the outer tapered part, to distribute pressure-contact forces more evenly, preventing deformation and enhancing sealing performance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If the pressure-contact allowance of the tapered surfaces is larger at a position closer to the passage wall surface, then the sealing strength between the tapered surfaces is improved, but the passage wall surface bends or warps toward the center of the flow passage causing narrowing of the flow passage
Solution Approach 1:
The invention applies different taper angles to different regions of the seal structure. The inner pressure-contact tapered part has a smaller taper angle than the inner tapered part, creating localized variations in pressure distribution. This allows the sealing surface to maintain high contact pressure for sealing strength while the overall structure prevents excessive force concentration that would cause passage wall deformation.
Solution Approach 2:
The invention changes the geometric parameters of the seal structure by introducing multiple taper angles. Specifically, the inner pressure-contact tapered part has a smaller taper angle compared to the inner tapered part, which modifies the pressure distribution pattern. This parameter change enables the system to achieve both high sealing strength and prevention of passage wall deformation by distributing the contact pressure more favorably.
2Reliability
If a large pressure-contact force is applied to a part of the connection end face near the thin passage wall, then the sealing performance is improved, but the passage wall surface bends or warps causing narrowing of the flow passage
Solution Approach 1:
The invention creates local quality differences in the pressure-contact structure by using an inner pressure-contact tapered part with a smaller taper angle. This localized structural modification concentrates the sealing force in a specific region (the inner pressure-contact tapered part) while reducing the overall pressure burden on the passage wall, thereby maintaining sealing performance without compromising wall stability.
Solution Approach 2:
The seal structure is segmented into multiple functional parts with different taper angles: the inner tapered part, the inner pressure-contact tapered part, and the outer pressure-contact tapered part. This segmentation allows each part to perform its specific function - the inner pressure-contact tapered part provides sealing force while the other parts distribute and balance the overall pressure load, preventing passage wall deformation.
3Force
If the annular protrusion is press-fitted in the annular groove to make the tapered surfaces contact, then the connection between parts is achieved, but the taper shapes are not optimized leading to uneven pressure distribution
Solution Approach 1:
The invention optimizes the local quality of the pressure-contact surfaces by introducing an inner pressure-contact tapered part with a specifically designed smaller taper angle. This creates a localized region with optimized pressure distribution characteristics, ensuring that the connection force is effectively transmitted while maintaining uniform stress distribution across the seal interface.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents deformation of flow passages and maintains high sealing performance by distributing pressure-contact forces more evenly, ensuring reliable fluid containment.
Implementation Method 1
the inner pressure-contact tapered part and the inner tapered part pressure-contact with each other
Implementation Method 2
the annular protrusion is press-fitted in the annular groove
Data Source
AI summary
In a connected-part seal structure configured to couple a first connected part and a second connected part through a seal member, the taper angles of first and second inner pressure-contact tapered parts provided in the seal member are smaller than the taper angles of first and second inner tapered parts provided in the first and second connected parts. Thus, a pressure-contact force of first and second inside tapered pressure-contact allowances are larger as the inside tapered pressure-contact allowances are located closer to base end parts of first and second annular protrusions.