Seal Insertion Tool for Tight-Packed Fluid Delivery Modules
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Solution Overview
Problem
The challenge in semiconductor chip fabrication is the difficulty in maintaining and repairing flow control apparatuses due to increasingly tight packaging and component miniaturization, which requires improved methods for assembling and replacing seals in fluid delivery modules without leakage.
Innovation Solution
A seal insertion tool and seal retainer system that allows for the efficient installation and replacement of annular seals in fluid delivery modules, enabling precise alignment and hermetic sealing of fluid ports, even in tight spaces, by using a tool with an end effector and actuator to press the seal into grooves, and a retainer that forms a seal assembly with fluid flow components.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If component size is decreased and packaging is made tighter to improve flow control technology, then manufacturing precision and space utilization are improved, but maintenance and repair difficulty increases due to limited access in tight quarters
Solution Approach 1:
The flow control apparatus is divided into modular components including a substrate block with fluid ports, flow control components that can be independently removed, and seals that can be replaced separately. This segmentation allows maintenance personnel to access and replace individual seals without disassembling the entire compact apparatus, thereby easing repair difficulties despite tight packaging
Solution Approach 2:
A seal installation tool serves as an intermediary device that bridges the gap between limited access space and seal installation requirements. The tool is designed to couple with the substrate block and guide seals into grooves in tight quarters, enabling seal replacement without requiring extensive disassembly or large working spaces
2Adaptability or versatility
If the number of components is increased to improve flow control capability, then functionality is improved, but assembly complexity and leakage risk increase
Solution Approach 1:
The substrate block serves multiple functions: it provides structural support, contains multiple fluid ports for different flow paths, and incorporates grooves for seal installation. The seal installation tool also serves multiple functions including coupling to the substrate block, guiding the seal, and pressing the seal into place. This multi-functionality reduces the number of separate components needed, simplifying assembly while maintaining flow control capability
Solution Approach 2:
The seal groove is integrated directly into the substrate block rather than being a separate component. The seal installation tool combines coupling, guiding, and pressing functions in a single device. This merging of functions and components reduces assembly complexity and the number of potential leakage points while maintaining the ability to control multiple fluid flows
3Ease of operation
If seal installation requires disassembly of flow control components, then seal access is improved, but maintenance time increases
Solution Approach 1:
The seal installation tool extracts the pressing function from the assembly process by providing a dedicated pressing surface that contacts and pushes the seal into the groove. This extracted function allows seal installation without requiring disassembly of flow control components, reducing maintenance time while maintaining ease of seal access
Solution Approach 2:
The seal installation tool is designed with a coupling mechanism that attaches to the substrate block before seal installation begins. The tool pre-positions the seal and maintains alignment during installation, eliminating the need for disassembly and reducing the time required for seal replacement while ensuring proper seal placement
Data Source
AI summary
Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication. These apparatuses for controlling fluid flow require a variety of fluid flow components which are tightly packaged within the apparatuses for controlling flow. Servicing the apparatuses requires specialized equipment and methods which enable installation of seals in close quarters in apparatuses which are installed in the field. Seal retainers may be used to retain the seals during assembly of fluid flow components into apparatus for controlling flow.