Sealed FOUP Cleaning Flow for Particle-Free Inner Surfaces
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Solution Overview
Problem
Current cleaning devices for pot-shaped hollow bodies, such as transport containers for semiconductor wafers and EUV lithography masks, require excessive time and cleaning fluid to achieve satisfactory results, leading to increased production costs and limited effectiveness in reducing particle contamination on inner surfaces.
Innovation Solution
A device with a support wall, locking mechanism, and drainage channel that allows for efficient dispensing and containment of a cleaning fluid within the hollow body, minimizing contamination from outer surfaces and optimizing fluid flow to effectively clean the inner surfaces using adjustable nozzles and sound waves.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the FOUPs are cleaned both on inner surfaces and outer surfaces simultaneously, then the outer surfaces are cleaned, but the cleaning fluid becomes contaminated with particles from outer surfaces and transports them to inner surfaces
Solution Approach 1:
The cleaning process is segmented into separate stages: first cleaning the outer surface, then cleaning the inner surface with a separate, uncontaminated cleaning fluid. This prevents particle transport from outer to inner surfaces while maintaining high cleaning quality for the inner surface.
Solution Approach 2:
The harmful factor (particle contamination) is extracted by using separate cleaning fluids for outer and inner surfaces. The cleaning fluid for the inner surface is kept isolated from particles generated during outer surface cleaning, thereby preventing contamination.
2Manufacturing precision
If the cleaning procedure is extended to remove sufficient particles from outer surfaces, then particle contamination is reduced, but the cleaning time and amount of cleaning fluid required increase significantly
Solution Approach 1:
The cleaning procedure is divided into two independent cleaning operations with separate fluids. This allows the inner surface to be cleaned efficiently without the time penalty of simultaneously cleaning the heavily contaminated outer surface, thus reducing total cleaning time while maintaining particle reduction effectiveness.
Solution Approach 2:
The cleaning fluid used for the outer surface is discarded after use, while a fresh, separate cleaning fluid is used for the inner surface. This prevents the need to extend cleaning time to compensate for fluid contamination, as each surface receives dedicated cleaning resources.
3Manufacturing precision
If the cleaning fluid accumulates particles from outer surfaces during cleaning, then outer surfaces are cleaned, but the cleaning fluid cannot effectively clean inner surfaces due to particle transport
Solution Approach 1:
The cleaning fluid supply is segmented into separate streams: one for outer surface cleaning and another for inner surface cleaning. This ensures the inner surface cleaning fluid remains particle-free and effective, eliminating the need to consume excessive fluid to compensate for contamination.
Solution Approach 2:
The harmful effect of particle accumulation is extracted by preventing the cleaning fluids from mixing. The inner surface cleaning fluid is kept separate from the outer surface cleaning process, maintaining its cleaning effectiveness without requiring additional fluid quantity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device significantly reduces the time and amount of cleaning fluid required, enhancing the cleaning efficiency of inner surfaces while preventing contamination from outer surfaces, thereby improving production efficiency and reducing costs.
Implementation Method 1
a cleaning device for dispensing a first cleaning fluid when the hollow body is connected to the support wall
Implementation Method 2
a first drainage channel by which the first cleaning fluid dispensed by the cleaning device can be drained
Implementation Method 3
a locking device by which the hollow body is sealingly connectable to the support wall
Data Source
AI summary
An apparatus for cleaning pot-shaped hollow bodies, in particular transport containers for semiconductor wafers or for EUV lithography masks includes a support wall onto which the hollow body can be placed by way of its edge surface, a locking device by means of which the hollow body can be sealingly and releasably connected to the support wall, a passage opening which is formed by the support wall and is arranged radially within the locking device, a cleaning device by means of which a first cleaning fluid can by dispensed for cleaning the hollow body inner surface when the hollow body is connected to the support wall and a first discharge channel with a first end. The first discharge channel is in fluidic communication with the passage opening and with which the first cleaning fluid dispensed by the cleaning device can be discharged.