Optical Component Alignment Through a Sealed Enclosure

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Solution Overview

Problem

Conventional methods for aligning optical components in optical pulse stretchers require opening the sealed enclosure, leading to risks of open beam operation, contamination, and manual errors, making the process time-consuming and difficult to achieve accurate alignment.

Innovation Solution

A camera system is used to monitor beam position, integrated with an image integration optical system that combines images from multiple optical features, allowing alignment without opening the enclosure and reducing manual handling, using fluorescent materials to visualize beam alignment.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional open beam paper target alignment method is used, then alignment can be performed, but the enclosure must be opened leading to contamination risks and safety hazards

Engineering Contradiction:

Improvealignment accuracyVSAvoidcontamination and radiation exposure

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent introduces an intermediary alignment system consisting of alignment markers mounted on the interior surfaces of the enclosure and a camera positioned outside to capture images of these markers. This intermediary system allows alignment to be performed through the sealed enclosure walls, eliminating the need to open the enclosure while maintaining alignment capability. The alignment markers serve as mediators between the external camera system and the internal optical components.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent replaces the mechanical manual alignment method (physically inserting and manipulating paper targets inside the enclosure) with an optical measurement system. The camera-based imaging system captures images of alignment markers, and software processes these images to determine beam position and guide alignment, substituting mechanical intervention with optical and computational methods.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Reliability

If manual alignment procedures are used, then alignment can be achieved, but the process is time-consuming and requires extensive manual operation

Engineering Contradiction:

Improvealignment capabilityVSAvoidalignment time

Core Design Contradiction:

ReliabilityVSLoss of time

Solution Approach 1:

The alignment system incorporates self-service capabilities through automated image capture and processing. The camera automatically captures images of alignment markers at multiple positions, and the integrated software automatically processes these images to calculate beam position and provide alignment guidance, reducing the need for continuous manual intervention and significantly decreasing alignment time.

Inventive Principle:

Principle #25Self-service

Solution Approach 2:

The system implements feedback by capturing images of alignment markers, processing these images to determine actual beam position, comparing this position with the desired position, and providing guidance for adjustment. This closed-loop feedback mechanism enables faster and more accurate alignment compared to open-loop manual methods.

Inventive Principle:

Principle #23Feedback

3Object-affected harmful factors

If the enclosure remains sealed during alignment, then contamination is prevented, but traditional alignment methods cannot access the optical components

Engineering Contradiction:

Improvecontamination protectionVSAvoidalignment accessibility

Core Design Contradiction:

Object-affected harmful factorsVSEase of operation

Solution Approach 1:

The patent uses alignment markers mounted on the interior surfaces of the sealed enclosure as intermediaries. These markers are visible through the enclosure walls to the external camera system, allowing the alignment process to be performed remotely without breaking the seal. The markers mediate between the sealed internal environment and the external alignment equipment.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The alignment markers serve multiple functions: they provide reference points for beam position measurement, enable imaging through the sealed enclosure walls, and work with the external camera system. This multi-functional approach allows the sealed enclosure to maintain its protective function while enabling remote alignment capabilities.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method minimizes open beam exposure, reduces contamination risks, and significantly decreases alignment time by enabling non-contact alignment, improving safety and accuracy while maintaining the optical components within a sealed environment.

Implementation Method 1

using fluorescent materials to visualize beam alignment

Methodology Applied

Scientific EffectFluorescence: Fluorescence

Data Source

PatentUS11799261B2Apparatus for and method of optical component alignment

Publication Date: 2023.10.24 CYMER INC

AI summary

Apparatus for and method of aligning optical components such as mirrors to facilitate proper beam alignment using an image integration optical system is used to integrate images from multiple optical features such as from both left mirror bank and right mirror bank to present the images simultaneously to the camera system. A fluorescent material may be used to render a beam footprint visible and the relative positions of the footprint and an alignment feature may be used to align the optical feature.