Sealed Consumable Part Transfer for Low-Downtime Processing

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Solution Overview

Problem

The replacement of consumable parts in processing devices requires opening the device to the atmosphere, leading to prolonged processing stop times and manual handling of large parts, which can be cumbersome.

Innovation Solution

A part transporting device with a container, robot arm, and moving mechanism that facilitates the automated replacement of consumable parts between processing devices without exposing the system to the atmosphere, using a robot arm to transfer used and unused parts through a sealed connection.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If manual replacement of consumable parts is performed by opening the processing device to the atmosphere, then the replacement operation is simple and accessible, but the processing stop time period becomes longer and the device requires evacuation after replacement

Engineering Contradiction:
Improvereplacement operation accessibilityVSAvoidprocessing stop time period
Core Design Contradiction:
Ease of operationVSLoss of time

Solution Approach 1:

A replacement device is introduced as an intermediary system between the processing device and the operator. This replacement device includes a container that can be opened to the atmosphere for easy part replacement, while maintaining a sealed connection to the processing device through a gate valve, thus mediating between the need for easy operation and the need to minimize processing stop time

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The system is segmented into two distinct zones: a replacement zone (container) that is open to atmosphere for easy manual operation, and a processing zone (processing device) that maintains vacuum/controlled environment. The gate valve creates a clear boundary between these zones, allowing independent optimization of each zone's characteristics

Inventive Principle:
Principle #1Segmentation

2Ease of operation

If the processing device is opened to the atmosphere for consumable part replacement, then manual extraction and mounting of parts is straightforward, but evacuation of the device interior is required afterward extending the downtime

Engineering Contradiction:
Improvepart extraction and mounting easeVSAvoidevacuation procedure requirement
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

The replacement device serves as an intermediary that isolates the evacuation complexity from the operator. The operator only interacts with the container side which is open to atmosphere, while the gate valve mediates the connection to the processing device side that requires vacuum maintenance, thus simplifying the operator's task while managing the evacuation requirement

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The replacement operation is extracted from the processing device and performed in a separate container. This extraction allows the replacement activity to occur in an atmosphere-friendly environment while the processing device maintains its vacuum state independently, eliminating the need to evacuate the processing device for replacement operations

Inventive Principle:
Principle #2Taking out (Extraction)

3Ease of manufacture

If large consumable parts are replaced manually, then the replacement process is simple in concept, but the replacement time increases due to the size and weight of the parts

Engineering Contradiction:
Improvereplacement process simplicityVSAvoidreplacement time
Core Design Contradiction:
Ease of manufactureVSLoss of time

Solution Approach 1:

The replacement device acts as an intermediary that provides mechanical assistance for handling large parts. The container can be equipped with automated mechanisms or tools that facilitate the extraction and mounting of heavy consumable parts, reducing the physical burden on operators while maintaining procedural simplicity

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The replacement device is designed to assist in the self-service replacement of large parts through its structure and mechanisms. The container can include features such as automated grippers, positioning systems, or ergonomic supports that enable operators to replace large consumable parts more efficiently with less physical effort and time

Inventive Principle:
Principle #25Self-service

Data Source

PatentUS20250108525A1Part transporting device and processing system
Publication Date: 2025.04.03 TOKYO ELECTRON LTD
  • US20250108525A1 patent drawing
  • US20250108525A1 patent drawing
  • US20250108525A1 patent drawing

AI summary

A part transporting device for transporting a consumable part includes a part housing, a container, a robot arm, and a moving mechanism. The part housing accommodates an unused consumable part and a used consumable part. The container has an opening to be connected to a processing device and a gate valve for opening or closing the opening, the container being configured to accommodate the part housing. The robot arm is provided in the container and has at least one end effector at a tip end thereof, the robot arm transferring the used consumable part from the processing device through the opening to accommodate the used consumable part in the part housing and transferring the unused consumable part from the part housing to load the unused consumable part into the processing device through the opening. The moving mechanism has a power source and is configured to move the part transporting device.