Sealing Ring Assembly With Thermal Expansion Clearance
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Solution Overview
Problem
Existing sealing assemblies for high temperature applications, such as semiconductor manufacturing, fail to provide sufficient space for thermal expansion of sealing materials, leading to potential damage and seal failure.
Innovation Solution
A sealing assembly comprising an outer ring with inwardly extending projections and an inner ring with outwardly extending projections, which enclose a center elastomeric sealing ring. This configuration allows for thermal expansion of the sealing ring while protecting it from aggressive environments.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If a standard vacuum seal design with a metal centering ring is used, then the assembly is suitable for room temperature to 100°C applications, but the seal is damaged and fails at temperatures above 100°C due to insufficient space for thermal expansion
Solution Approach 1:
The patent changes the geometric parameters of the centering ring, specifically transitioning from a rectangular cross-section to a rounded cross-section with increased height. This parameter change creates additional clearance space that accommodates thermal expansion of the elastomeric seal at elevated temperatures, thereby maintaining seal reliability in high-temperature applications
Solution Approach 2:
The design incorporates pre-calculated thermal expansion clearance in the centering ring dimensions before the seal is installed. This beforehand cushioning space prevents the seal from being compressed beyond its elastic limit during thermal expansion, avoiding premature failure in high-temperature service conditions
2Device complexity
If a metal centering ring with rectangular cross section is used, then the assembly structure is simple, but the seal is exposed to process gasses and suffers from increased thermal expansion damage
Solution Approach 1:
The patent employs an elastomeric seal with a rounded cross-sectional profile that acts as a flexible protective shell. This rounded seal geometry provides inherent resistance to process gas penetration while the increased height accommodates thermal expansion, reducing harmful effects without significantly increasing assembly complexity
Solution Approach 2:
The assembly combines a metal centering ring with an elastomeric seal featuring a rounded cross-section. This composite structure leverages the strength and dimensional stability of metal while utilizing the flexibility and gas resistance properties of the elastomer, creating a balanced solution that addresses both structural simplicity and seal protection requirements
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The proposed sealing assembly effectively prevents damage to the sealing ring due to thermal expansion and maintains a cohesive assembly in high temperature applications, ensuring reliable performance in industrial settings.
Implementation Method 1
the elastomeric center sealing ring is enclosed within the outer and the inner rings so as to protect the center sealing ring and allow for thermal expansion of the center sealing ring
Data Source
Figure 1~1A
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Figure 7~11
AI summary
Sealing assemblies are described herein useful for high temperature applications, as well as applications involving aggressive chemical reactants, byproducts and/or reaction environments. The assemblies include an outer ring having an interior surface having two inwardly extending projections defining a seal receiving area, an inner ring having an exterior surface having two outwardly extending projections defining a seal receiving area; and a center sealing ring configured to be positioned within the seal receiving areas of the outer ring and the inner ring. When the sealing assembly is installed in a high temperature application, the elastomeric center sealing ring is enclosed within the outer and the inner rings so as to protect the center sealing ring while allowing for thermal expansion of the center sealing ring. In further embodiments, bonded sealing ring bodies are disclosed as well.