Secondary Electron Detection Efficiency in FIB Systems
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Solution Overview
Problem
Current focused ion beam (FIB) systems face limitations in achieving high image resolution due to reduced ion beam current, which results in lower secondary electron detection efficiency, limiting the resolution of images obtained by secondary electron detectors.
Innovation Solution
The implementation of a charged particle detector system with elongate members and a drawing member that generate an electromagnetic field to attract and stabilize charged particles, increasing the number of particles reaching the detector and reducing collisions, thereby enhancing image resolution.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If ion beam current is reduced to improve image resolution, then image resolution is improved, but the quantity of secondary electrons is reduced
Solution Approach 1:
The patent changes the electrical parameters (bias voltages) of the elongate members and drawing member to optimize the electromagnetic field configuration. By adjusting these voltage parameters, the system enhances secondary electron collection efficiency without requiring increased ion beam current, thus resolving the contradiction between maintaining low current for resolution and sufficient electron quantity for detection
Solution Approach 2:
The patent introduces elongate members and a drawing member as intermediary components between the sample and the secondary electron detector. These intermediaries create electromagnetic fields that guide and concentrate secondary electrons toward the detector, effectively increasing the detected electron quantity without increasing the primary ion beam current
2Measurement precision
If secondary electron detection efficiency is increased to improve image resolution, then image resolution is improved, but the complexity of the detection system increases
Solution Approach 1:
The detection system is segmented into distinct functional components: elongate members for field generation, a drawing member for electron concentration, and the detector itself. This segmentation allows each component to be optimized independently and facilitates easier adjustment and maintenance, managing the overall system complexity while achieving high detection efficiency
Solution Approach 2:
The elongate members serve multiple functions: they generate electromagnetic fields for electron guidance, define the detection volume, and can be adjusted to optimize performance for different sampling conditions. This multi-functionality reduces the need for additional specialized components, thereby managing system complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration improves the efficiency of charged particle detection, allowing for higher-resolution images by increasing the number of charged particles detected and reducing losses to the sample or other structures, thus enhancing the imaging capabilities of FIB systems.
Implementation Method 1
The electromagnetic field generated by the first elongate member, the second elongate members, and the drawing member defines a charged particle flow path within which a majority of charged particles travel from the sample to the charged particle detector
Implementation Method 2
The drawing member is configured to generate an electromagnetic field that applies a drawing force that draws charged particles away from the charged particle source, and/or reduces the amount of charged particles from the charged particle source that strike the charged particle tool
Implementation Method 3
When the bias voltage is applied to the path stabilization member, an electromagnetic field is generated that applies a stabilization force that increases the number of charged particles that remain within a charged particle flow path as the charged particles travel from the sample and to the charged particle detector
Data Source
AI summary
Systems and devices for improving the efficiency of secondary electron detection in charged particle beam systems include a charged particle detector, a first elongate member coupled with the charged particle detector, and a second elongate member coupled with the charged particle detector. The first elongate member and the second elongate member each extend away from the charged particle detector. The system also includes at least one drawing member that is coupled with the first elongate member. Additionally, at least one electrical connection point is arranged to supply at least one bias voltage to the first elongate member, the second elongate member, and the drawing member. The drawing member is configured to generate an electromagnetic field that applies a drawing force that draws charged particles away from the charged particle source, and/or reduces the amount of charged particles from the charged particle source that strike the charged particle tool.