Secure Maintenance Analysis for Semiconductor Equipment Parameters
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Solution Overview
Problem
Existing semiconductor manufacturing device monitoring systems face limitations in predicting defects or failures due to secrecy around know-how parameters and business competition among manufacturers, which restricts the improvement of prediction accuracy.
Innovation Solution
A device management system that receives and analyzes operation status parameters in a concealed form using secure calculation methods, such as homomorphic encryption or multi-party calculation, to perform indication maintenance analysis while keeping know-how information secret.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If operation status parameters are collected for prediction analysis, then prediction accuracy is improved, but know-how information secrecy is compromised
Solution Approach 1:
The patent introduces a prediction information management system that acts as an intermediary between semiconductor manufacturing devices and analysis systems. This system collects operation status parameters, conceals know-how information through controlled access and authorization mechanisms, and transmits only necessary prediction-related data to the prediction analysis system, thereby maintaining secrecy while enabling accurate prediction analysis
Solution Approach 2:
The patent segments the data flow into distinct components: operation status parameters are separated from sensitive know-how information, and only the necessary prediction-related parameters are transmitted to the analysis system. This segmentation allows prediction accuracy to be maintained while protecting proprietary information from exposure
2Measurement precision
If multiple manufacturers share data for analysis, then prediction accuracy is improved, but business competition secrecy is compromised
Solution Approach 1:
The prediction information management system serves as a neutral intermediary that enables multiple manufacturers to contribute data for collective prediction analysis without direct exposure of their proprietary information. The system manages authorization and data transmission controls to ensure that competitive secrets remain protected while still allowing beneficial data sharing for improved prediction accuracy
Solution Approach 2:
The patent creates a universal prediction information management system that can serve multiple semiconductor manufacturers simultaneously. This multi-functional system handles data collection, concealment, and transmission for various manufacturers, enabling industry-wide prediction accuracy improvement while maintaining individual manufacturer secrecy through standardized authorization mechanisms
Data Source
AI summary
A device management system of this disclosure comprises: a parameter reception means for receiving, in a concealed format, a parameter relating to the operation status of a semiconductor manufacturing device, the parameter being used in an analysis relating to indication maintenance of the semiconductor manufacturing device; an indication maintenance analysis means for performing an analysis, by a secret calculation which uses the received parameter in the concealed format and which is related to indication maintenance of a component of the semiconductor manufacturing device; and an output means for outputting the analysis result of the indication maintenance of the component.