Seesaw Mechanism for Compact Substrate Cleaning
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Solution Overview
Problem
Existing substrate processing apparatuses with brush-based cleaning mechanisms have a heightened vertical profile due to the placement of the brush pushing actuator above the holding arm, which complicates design and maintenance within limited ceiling spaces.
Innovation Solution
The use of a seesaw member with a fulcrum and a pushing actuator positioned to swing the seesaw member, allowing the brush to be pushed to the substrate while reducing the overall height of the apparatus by enabling the actuator to be placed below or beside the seesaw member, thus minimizing vertical height.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the brush pushing actuator is disposed above the shaft in the holding arm, then the brush can be pushed to the substrate, but the vertical height of the holding arm and processing unit is increased
Solution Approach 1:
The actuator is repositioned from a vertical arrangement (above the shaft) to a horizontal arrangement (beside the shaft), changing the spatial dimension of the mechanism. This dimensional shift allows the brush pushing function to be achieved without increasing the vertical height of the holding arm, thereby resolving the contradiction between operational capability and compact vertical profile.
Solution Approach 2:
Instead of placing the actuator above the shaft as in conventional designs, the invention inverts the arrangement by positioning the actuator beside the shaft. This inverted configuration achieves the same brush pushing function while eliminating the vertical height penalty, directly addressing the technical contradiction.
2Area of stationary object
If multiple processing units are vertically stacked to reduce footprint, then the horizontal space is saved, but the overall vertical height of the apparatus is increased
Solution Approach 1:
By changing the actuator arrangement from vertical to horizontal, the invention reduces the vertical height of each processing unit. This allows multiple units to be stacked within the same ceiling height limit, enabling space-saving vertical stacking without exceeding height constraints, thus resolving the contradiction between footprint reduction and height control.
3Ease of operation
If the holding arm is increased in vertical height to accommodate the actuator, then the brush can be pushed to the substrate, but the processing unit height is increased making maintenance difficult
Solution Approach 1:
The invention inverts the conventional actuator placement by positioning it beside the shaft rather than above it. This inverted arrangement maintains the brush pushing function while reducing the vertical height of the holding arm, thereby improving maintenance accessibility and resolving the contradiction between operational function and ease of repair.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for effective substrate cleaning while reducing the vertical height of the processing apparatus, enhancing spatial efficiency and facilitating easier maintenance and design within constrained environments.
Implementation Method 1
a seesaw member which is swingable with a support member serving as a fulcrum and which has a force point section at one side with respect to the fulcrum and an actuating point section at the other side with respect to the fulcrum
Data Source
AI summary
A substrate processing apparatus includes: a brush for cleaning a substrate; a seesaw member which is swingable with a support member serving as a fulcrum and which has a force point section at one side with respect to the fulcrum and an actuating point section at the other side with respect to the fulcrum; a pushing actuator arranged to give a driving force to the force point section of the seesaw member, thereby to swing the seesaw member around the fulcrum, thus giving, to the seesaw member, a pushing force for pushing the brush to the substrate; and a transmission member which has an affected point section for receiving, from the actuating point section of the seesaw member, a driving force given to the force point section, and which transmits, to the brush, a pushing force for pushing the same to the substrate.