Segmented Annular Rib for Plasma Droplet Capture
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Solution Overview
Problem
The existing annular rib in plasma processing apparatuses is prone to forming high-strength deposited matter due to plasma stream aggregation, leading to potential short circuits and uneven plasma treatment when these fragments fall into the plasma generating portion.
Innovation Solution
The annular rib is divided into multiple segments with indentations to reduce the size of deposited matter, ensuring that fragments enter the groove portion between the cathode and wall surface, preventing short circuits and optimizing droplet capture efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If an annular rib is used to capture droplets in the plasma advancing tube, then droplet capture efficiency is improved, but deposited matter forms large fragments that can cause short circuits
Solution Approach 1:
The annular rib is divided into multiple segments (first annular rib segment, second annular rib segment, third annular rib segment) arranged along the plasma flow direction. This segmentation ensures that when deposited matter forms on the rib, it breaks into small fragments that fall into the groove portion rather than forming large hazardous fragments. The segmentation maintains droplet capture functionality while eliminating the short circuit risk.
2Productivity
If the annular rib is exposed to plasma stream, then plasma treatment is enabled, but high-strength deposited matter aggregates on the rib
Solution Approach 1:
By dividing the annular rib into multiple segments, the patent ensures that even when high-strength deposited matter aggregates on the rib segments, the maximum fragment size is limited by the segment dimensions. This prevents the formation of large, high-strength fragments that could cause short circuits, while still allowing the rib to be exposed to plasma stream for effective plasma treatment.
Solution Approach 2:
The patent creates different functional zones: the rib segments are positioned to capture droplets while the groove portion collects fragmented deposited matter. The local structure of each rib segment is optimized for droplet capture, while the overall arrangement ensures deposited matter is contained in a safe location.
3Ease of manufacture
If deposited matter falls from the annular rib, then material is removed from the rib, but large fragments cause short circuits between cathode and wall surface
Solution Approach 1:
The annular rib is segmented into multiple sections, ensuring that any deposited matter falling from the rib breaks into small fragments corresponding to the segment sizes. These small fragments fall into the groove portion between the cathode and wall surface, preventing electrical short circuits while still allowing material removal from the rib structure.
Solution Approach 2:
The groove portion acts as an intermediary structure that intercepts falling deposited matter fragments. By providing this intermediate collection zone, the patent prevents direct contact between large fragments and the electrical components, eliminating the short circuit hazard while maintaining rib functionality.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively reduces the size of deposited matter fragments, preventing short circuits and enhancing droplet capture efficiency, leading to improved plasma treatment stability and apparatus reliability.
Implementation Method 1
The droplets generated in the plasma generating portion collide with rib 142, and are captured
Implementation Method 2
The plasma formed this way is led from the plasma generating portion to a plasma advancing tube as a plasma stream
Implementation Method 3
plasma is formed from said cathode by generating an arc discharge under vacuum between it and the trigger electrode that is an anode
Data Source
AI summary
A plasma stream-derived deposited matter formed on an annular rib for droplet capture in a plasma processing apparatus is prevented from falling into a plasma generation portion and causing a short circuit. The annular rib for the droplet capture is divided into multiple rib segments. Thus, from the beginning of the formation of the deposited matter on the annular rib due to the aggregation of the material in the plasma stream, it is possible to reduce the size of the deposited matter. By reducing the size of this deposited matter, when a piece of the deposited matter falls into the plasma generation portion, the piece of the deposited matter gets into a groove portion provided between a cathode and a wall surface of the plasma generation portion, thereby preventing the electrical short circuit between the cathode and the wall surface.