Segmented Base Block Fluid Control System for Semiconductor Manufacturing
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Solution Overview
Problem
The existing fluid control systems for manufacturing processes, such as semiconductor manufacturing, face challenges in being compact and integrated while maintaining high responsiveness, leading to increased assembly difficulties and reduced maintainability, along with decreased support rigidity and flow path processing issues due to the compactness of the base block.
Innovation Solution
A fluid control system design that uses upstream and downstream base blocks with screw holes and seal members to securely fix fluid devices, allowing for a compact and integrated configuration while maintaining support rigidity and ease of assembly and maintenance through the use of tightening bolts for coupling and fixing the base blocks to a base plate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If the base block is made more compact to integrate the fluid control system closer to the process chamber, then the system responsiveness is improved, but the support rigidity of the base block decreases and assembly becomes more difficult
Solution Approach 1:
The base block is divided into an upstream-side base block and a downstream-side base block that are disposed in a predetermined direction. This segmentation allows each block to be optimized independently - they can be made compact for responsiveness while maintaining sufficient rigidity through the distributed structure. The fluid device body spans across both blocks, with the upstream-side base block supporting one end and the downstream-side base block supporting the other end.
Solution Approach 2:
The invention transitions from a single-block configuration to a multi-block configuration arranged in a predetermined direction (longitudinal dimension). By distributing the support function across multiple blocks in sequence rather than concentrating everything in one block, the system achieves both compactness and rigidity through spatial distribution.
2Volume of moving object
If the base block is made more compact to reduce system size, then integration is improved, but the difficulty of processing the flow path increases
Solution Approach 1:
Dividing the base block into multiple segments provides larger individual processing areas for each block compared to a single compact block. This makes flow path processing easier while achieving overall compactness through the distributed arrangement of multiple blocks in a predetermined direction.
3Volume of moving object
If the base block is made more compact to reduce system size, then integration is improved, but the difficulty of securing forming region for through holes increases
Solution Approach 1:
By segmenting the base block into multiple blocks, each block provides sufficient space for forming through holes and other structural features. The segmented configuration distributes the structural requirements across multiple components, making manufacturing easier while maintaining overall system compactness.
4Volume of moving object
If the base block is made more compact to reduce system size, then integration is improved, but assembly work becomes more difficult and assembly man-hours increase
Solution Approach 1:
The segmented base block structure with upstream-side and downstream-side blocks provides better accessibility for assembly operations. The distributed configuration allows workers to access different parts of the system more easily compared to a dense single-block design, reducing assembly difficulty and man-hours.
Solution Approach 2:
By arranging base blocks in a predetermined direction rather than concentrating all features in one location, the invention creates a more accessible spatial layout that facilitates assembly work while maintaining system integration.
5Volume of moving object
If the base block is made more compact to reduce system size, then integration is improved, but maintainability deteriorates
Solution Approach 1:
The segmented base block configuration improves maintainability by distributing components across multiple blocks, making it easier to access and service individual parts. The upstream-side and downstream-side blocks can be independently accessed and maintained, unlike a single compact block where components would be crowded together.
Data Source
AI summary
Provided is a fluid control system including upstream-side and downstream-side base blocks, each defining a flow path provided with flow path ports, including a screw hole and a screw hole formed between the two flow path ports in longitudinal directions, and coupling to the upstream-side and downstream-side base blocks and a body of a fluid device by tightening bolts. End portions of the upstream-side and downstream-side base blocks are coupled to each other by the tightening bolts.