Segmented Coil Plasma Module for Uniform Large-Substrate Processing
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Solution Overview
Problem
Conventional inductively coupled plasma (ICP) excitation modules face challenges in achieving uniform plasma distribution, particularly for large-scaled substrates, due to standing wave effects and difficulty in adjusting plasma uniformity, which affects film deposition and etching processes, and existing solutions either require complex coil geometries or high fabrication costs.
Innovation Solution
A plasma excitation module with coils disposed in parallel connection outside a dielectric layer and a multi-duct gas intake system, allowing for adjustable electromagnetic and gas flow fields to achieve uniform plasma density, avoiding standing wave effects and simplifying fabrication.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If the coils are made longer to cover large-scaled substrates, then the coverage area is improved, but standing wave effects occur which reduce energy transmission efficiency
Solution Approach 1:
The single long coil is segmented into multiple smaller coil units arranged in an array. Each coil unit operates independently or in coordinated groups, preventing standing wave effects that would occur in a single long coil while maintaining coverage of large substrates through the distributed arrangement of multiple units.
2Loss of energy
If the coil geometry is made complex to avoid standing wave effects, then the energy transmission efficiency is improved, but the fabrication difficulty and production cost increase
Solution Approach 1:
Instead of creating a single complex coil geometry, the system segments the coil into multiple simple, identical units. Each unit has a standard, easy-to-fabricate geometry, and the array arrangement provides the standing wave mitigation without requiring complex individual coil designs.
Solution Approach 2:
Multiple simple coil units are combined in an array configuration to achieve the collective effect of avoiding standing waves. The merging of multiple identical or similar units provides the functional benefit of complex geometry while maintaining the manufacturing simplicity of individual standard units.
3Stability of the object's composition
If the coils are embedded in a dielectric layer to adjust coupling intensity, then the plasma uniformity is improved, but the fabrication complexity and cost increase due to sintering requirements
Solution Approach 1:
The dielectric layer with embedded coils is segmented into multiple discrete coil units, each with its own simple dielectric support structure. This segmentation avoids the need to sinter large-scale dielectric layers while maintaining plasma uniformity through the distributed coil array configuration.
4Device complexity
If a single side gas-feeding device is used, then the device complexity is reduced, but the plasma density uniformity deteriorates in large-scaled applications
Solution Approach 1:
The single gas-feeding device is segmented into multiple gas supply points distributed across the chamber, corresponding to the segmented coil array. This segmentation enables uniform gas distribution across large substrates while maintaining relative system simplicity through modular gas supply components.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution results in improved uniformity of plasma distribution, enhancing film formation and etching processes while reducing fabrication complexity and costs, suitable for large-scaled applications.
Implementation Method 1
the coils are disposed at an outer side of the dielectric layer of the chamber, and every coil is disposed in parallel connection
Implementation Method 2
the plasma gets broad applications today. As one of the various applications thereof, the plasma processing commonly refers to convert gas into plasma, so as to deposit a plasma gas onto a substrate
Data Source
AI summary
A plasma excitation module including a chamber, a plurality of coils and a multi-duct gas intake system is provided. The chamber has a dielectric layer. The coils are disposed at an outer side of the dielectric layer, and the coils are separated from each other by an interval and in parallel connection. The multi-duct gas intake system surrounds the dielectric layer and is communicated with the chamber.