Segmented Collector Electrodes for Continuous Beam Current Distribution Measurement
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Solution Overview
Problem
Existing beam current measuring devices using Faraday cups cannot measure beam current distribution seamlessly and continuously due to gaps between collector electrodes, leading to unmeasurable regions and potential short circuits.
Innovation Solution
A beam current measuring device with a plurality of collector electrodes arranged to have seamless detection regions, allowing continuous measurement, and optionally using a switching circuit to share an ammeter and a single opening in the mask and secondary electron suppression electrode for each collector electrode, reducing the risk of short circuits.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple Faraday cups are arranged with interspaces to measure beam current distribution, then beam current measurement capability is improved, but measurement continuity is worsened due to unmeasurable interspace regions
Solution Approach 1:
The collector electrode is segmented into multiple measurement regions along the scanning direction, with each region capable of independently measuring beam current. The segmentation allows continuous coverage by eliminating gaps between adjacent collector electrodes, enabling seamless measurement of beam current distribution across the entire scanning path.
2Measurement precision
If multiple openings are formed in mask and secondary electron suppression electrode for each Faraday cup, then measurement coverage is improved, but device complexity and short circuit risk are worsened
Solution Approach 1:
Multiple openings in the mask and secondary electron suppression electrode are merged into a single continuous opening structure that spans across all collector electrodes. This unified opening design simplifies the overall device structure, reduces the number of discrete components, and eliminates potential short circuit paths between adjacent collector electrodes while maintaining full measurement coverage.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise, continuous measurement of beam current distribution, including obliquely irradiated components, and reduces the need for multiple openings in the mask and electrode, improving measurement accuracy and reducing apparatus costs.
Implementation Method 1
a Faraday cup composed of a cup-shaped collector electrode is employed as a measuring device for measuring a beam current of a charged particle beam
Data Source
AI summary
A beam current measuring device capable of performing measurement of a beam current distribution of a charged particle beam seamlessly and continuously in an arbitrary direction is provided. The beam current measuring device includes collector electrodes whose detection regions seamlessly continue in an arrangement direction thereof.