Segmented Cover Bodies for Boiling Phosphoric Acid Containment
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Solution Overview
Problem
The existing substrate liquid processing apparatuses for semiconductor manufacturing face challenges in preventing the splashing and scattering of boiling phosphoric acid aqueous solution during the silicon nitride film etching process, leading to contamination and management issues.
Innovation Solution
The apparatus incorporates a cover body structure with a first and second cover body that can be moved between closing and opening positions, featuring a gap between their sidewalls to contain the boiling processing liquid, thereby preventing splashing and scattering, even when in contact with the phosphoric acid solution.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single cover body is provided at the processing tub to suppress spray, then the structure is simple, but the boiling processing liquid splashes out from gaps between the cover body and processing tub
Solution Approach 1:
The single cover body is divided into a first cover body and a second cover body that can move independently between closing and opening positions. This segmentation allows the cover structure to better conform to the processing tub geometry and reduces gaps where spray can escape, while maintaining operational simplicity through coordinated movement of the two cover portions.
2Temperature
If the cover body is brought into contact with the phosphoric acid aqueous solution to improve temperature control, then temperature controllability is improved, but the likelihood of phosphoric acid solution splashing out increases
Solution Approach 1:
The cover body is designed with movable portions that can dynamically adjust between closing and opening positions. This dynamic configuration allows the cover to maintain contact with the boiling phosphoric acid solution for temperature control while enabling controlled opening to prevent spray scattering, resolving the contradiction between thermal management and spray prevention.
3Ease of operation
If the cover body is opened to carry substrate in/out, then substrate access is enabled, but the phosphoric acid aqueous solution scatters around the processing tub
Solution Approach 1:
The cover body is segmented into movable first and second cover portions that can be opened independently or together. This segmentation enables substrate access by opening only the necessary portion while keeping other areas covered, thereby preventing phosphoric acid solution scattering during substrate carry-in/out operations while maintaining operational ease.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively suppresses the splashing of phosphoric acid aqueous solution, maintaining a controlled temperature and boiling state, and prevents contamination, enhancing the management of processing liquids within the system.
Implementation Method 1
The phosphoric acid aqueous solution within the inner tub is maintained in a boiling state. For this reason, whenever bubbles generated by boiling reaches a liquid surface, spray of the phosphoric acid aqueous solution is generated
Data Source
AI summary
A substrate liquid processing apparatus includes an inner tub 34A having a top opening and storing a processing liquid therein; an outer tub 34B provided outside the inner tub; a first cover body 71 configured to move between a closing position where a first region of the top opening is closed and an opening position where the first region is opened; and a second cover body 72 configured to move between a closing position where a second region of the top opening is closed and an opening position where the second region is opened. The first cover body has a bottom wall 711R and a sidewall 712R extended upwards therefrom, and the second cover body has a bottom wall 721R and a sidewall 722R extended upwards therefrom. Further, when being placed at the closing positions, the sidewalls closely face each other with a gap G having a height H.