Segmented Detector for Discriminative Scanning Transmission Electron Microscopy

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Current Integrated Vector Field (iVF) imaging techniques struggle to achieve high-quality imaging for multi-elemental specimens, as they fail to effectively discriminate and detail signals from different elemental constituents based on their atomic numbers, leading to overlapping and unclear images.

Innovation Solution

The method involves using a segmented detector to isolate and compile imaging vector fields from specific sub-regions of the beam footprint, allowing for the creation of composite images that separate and enhance the imaging of elements with varying atomic numbers by focusing on distinct radial regions of the beam footprint, utilizing pixelated or annular detection surfaces and aperture plates to select and adjust the sub-regions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional iVF imaging techniques are used to image multi-elemental specimens, then the imaging process is simple and fast, but the imaging quality and element discrimination are poor

Engineering Contradiction:
Improveelement discrimination capabilityVSAvoidimaging system complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The detector is divided into multiple segments (e.g., four quadrants) that can independently detect charged particles from different angular regions. Each segment processes signals separately to extract element-specific information, enabling discrimination between different elemental constituents based on their atomic numbers while maintaining a relatively simple overall system architecture

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different segments of the detector are assigned to detect specific angular ranges of transmitted charged particles. By analyzing the spatial distribution and angular scattering patterns in different regions, the system can distinguish between elements with different atomic numbers, as lower-Z elements produce different scattering patterns compared to higher-Z elements

Inventive Principle:
Principle #3Local quality

2Loss of information

If the entire beam footprint is used for imaging, then the signal intensity is high, but the element-specific information is lost due to signal overlap

Engineering Contradiction:
Improveelemental signal separationVSAvoidsignal intensity
Core Design Contradiction:
Loss of informationVSUse of energy by moving object

Solution Approach 1:

The beam footprint on the detector is divided into multiple segments that correspond to different angular scattering regions. Each segment collects signals from specific scattering angles, allowing separation of elemental signals based on their characteristic scattering patterns. This segmentation prevents signal overlap while maintaining adequate signal intensity in each segment

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system utilizes changes in scattering angle as a parameter to differentiate between elements. By detecting charged particles at different angular positions through segmented detection, the system can distinguish between elements with different atomic numbers, as the scattering angle distribution varies with atomic number, thereby separating elemental signals without losing intensity

Inventive Principle:
Principle #35Parameter changes

3Measurement precision

If segmented detection is implemented to separate elemental signals, then element discrimination improves, but the device complexity increases

Engineering Contradiction:
Improveelement discrimination capabilityVSAvoiddetector complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The detector is divided into a manageable number of segments (e.g., four quadrants) that can be independently read out. Each segment is equipped with standard detection electronics, avoiding the need for overly complex specialized components. This segmentation provides sufficient element discrimination capability while keeping the detector design and electronics relatively simple

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The segmented detector uses standard detection components and processing electronics that can be applied to each segment. The same basic detector technology and signal processing methods are used across all segments, providing multi-functionality for detecting different elemental signals without requiring specialized complex components for each segment

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables more detailed and discriminative imaging of multi-elemental specimens by isolating and combining images from different sub-regions, effectively separating signals from lower-Z and higher-Z constituents, resulting in clearer and more accurate compound images.

Implementation Method 1

a segmented detector for detecting a flux of charged particles traversing the specimen, which flux forms a beam footprint on said detector

Methodology Applied
Scientific EffectCharged particle detection:

Implementation Method 2

a beam of charged particles that is directed from a source through an illuminator so as to irradiate the specimen

Methodology Applied
Scientific EffectCharged particle scattering: Scattering

Data Source

PatentEP3534391B1Discriminative imaging technique in scanning transmission charged particle microscopy
Publication Date: 2020.11.04 FEI CO
  • EP3534391B1 patent drawingFigure 1
  • EP3534391B1 patent drawingFigure 2A
  • EP3534391B1 patent drawingFigure 2B

AI summary

A method of imaging a specimen in a Scanning Transmission Charged Particle Microscope, comprising the following steps: - Providing the specimen on a specimen holder; - Providing a beam of charged particles that is directed from a source through an illuminator so as to irradiate the specimen; - Providing a segmented detector for detecting a flux of charged particles traversing the specimen, which flux forms a beam footprint on said detector; - Causing said beam to scan across a surface of the specimen, combining signals from different segments of the detector so as to produce a vector output from the detector at each scan position, and compiling this data to yield an imaging vector field; - Mathematically processing said imaging vector field by subjecting it to a two-dimensional integration operation, thereby producing an integrated vector field image of the specimen, specifically comprising: - Using a confined sub-region of said beam footprint to produce said vector output, and the attendant imaging vector field and integrated vector field image.