Segmented Edge Ring Transfer for Continuous Substrate Processing

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Solution Overview

Problem

Existing substrate processing devices face challenges in efficiently transferring and replacing edge rings due to their size constraints, which necessitate manual intervention and disrupt the processing workflow.

Innovation Solution

The edge ring is divided into a transferrable inner ring and a fixed outer ring, with independent electrostatic attraction and control mechanisms, allowing automated transfer through the loading/unloading port without disrupting the process.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the edge ring is made as a single integrated component, then it provides structural integrity and uniform processing, but it cannot be transferred or replaced without disrupting the processing workflow

Engineering Contradiction:

Improvecontinuous processing operationsVSAvoidedge ring replacement

Core Design Contradiction:

ProductivityVSEase of operation

Solution Approach 1:

The edge ring is divided into two separate components: a first edge ring that can be transferred and replaced, and a second edge ring that remains fixed. This segmentation allows the first edge ring to be independently transferred through the loading/unloading port without removing the substrate or disrupting processing, while the second edge ring provides continuous structural support and electrical connection to the electrostatic chuck.

Inventive Principle:

Principle #1Segmentation

2Reliability

If the edge ring is made transferrable, then it can be replaced to extend device lifetime, but it becomes difficult to transfer through the loading/unloading port due to size constraints

Engineering Contradiction:

Improveedge ring lifespanVSAvoidedge ring diameter

Core Design Contradiction:

ReliabilityVSLength of moving object

Solution Approach 1:

By dividing the edge ring into a smaller first edge ring (transferable) and a larger second edge ring (fixed), the first edge ring's reduced size enables it to pass through the loading/unloading port, while the second edge ring maintains the overall structural integrity and electrical connectivity required for device operation.

Inventive Principle:

Principle #1Segmentation

3Ease of operation

If manual intervention is used for edge ring replacement, then flexibility is maintained, but processing workflow is disrupted and productivity decreases

Engineering Contradiction:

Improveedge ring replacement flexibilityVSAvoidprocessing workflow continuity

Core Design Contradiction:

Ease of operationVSProductivity

Solution Approach 1:

The first edge ring is designed to be automatically transferred by the substrate transfer mechanism without requiring manual intervention. The electrostatic attraction between the first electrode and the first edge ring, along with the lifter pin mechanism, enables automated replacement of the first edge ring while the substrate remains on the electrostatic chuck, thus maintaining continuous processing workflow.

Inventive Principle:

Principle #25Self-service

4Stability of the object's composition

If the entire edge ring is fixed to the electrostatic chuck, then structural stability is maintained, but the edge ring cannot be replaced or transferred

Engineering Contradiction:

Improveedge ring structural stabilityVSAvoidedge ring transferability

Core Design Contradiction:

Stability of the object's compositionVSAdaptability or versatility

Solution Approach 1:

The edge ring system is segmented into a fixed second edge ring that provides stable structural support and electrical connection to the electrostatic chuck, and a transferable first edge ring that can be independently replaced. This segmentation allows the system to maintain structural stability through the fixed portion while enabling adaptability and transferability through the movable portion.

Inventive Principle:

Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enables efficient, automated replacement of the edge ring, reducing downtime and improving productivity by maintaining continuous processing operations.

Implementation Method 1

an electrostatic chuck configured to electrostatically attract and hold the substrate

Methodology Applied

Scientific EffectElectrostatic attraction: Electrostatics

Implementation Method 2

first a electrode for electrostatic attraction of the first edge ring

Methodology Applied

Scientific EffectElectrostatic attraction: Electrostatics

Implementation Method 3

second electrode for electrostatic attraction of the second edge ring

Methodology Applied

Scientific EffectElectrostatic attraction: Electrostatics

Data Source

PatentUS20250329519A1Mounting base, substrate processing device, edge ring, and edge ring transfer method

Publication Date: 2025.10.23 TOKYO ELECTRON LTD

AI summary

A mounting base for placing a substrate to be subjected to a predetermined processing is provided. The mounting base includes an electrostatic chuck for electrostatically attracting and holding the substrate, a first edge ring that is disposed around the substrate and is transferrable, a second edge ring fixed around the first edge ring, a lifter pin for raising and lowering the first edge ring, a first electrode disposed in a position facing the first edge ring in the electrostatic chuck to electrostatically attract and hold the first edge ring; and a second electrode disposed in a position facing the second edge ring in the electrostatic chuck to electrostatically attract and hold the second edge ring.