Segmented Electroconductive Member for Imaging Device Resistance Control

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Solution Overview

Problem

The variability in electric resistance of the electroconductive member in solid state imaging devices poses challenges to ensuring stability and consistent operation, as it affects charge readout speed and heat generation, leading to dispersion issues.

Innovation Solution

The electroconductive member is designed with alternating regions of different electric resistivities, where the second region has a lower resistivity than the first, allowing for a combined resistance that stabilizes the device's operation without increasing dispersion, and is composed of polysilicon doped with varying impurity concentrations to maintain uniformity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If the electric resistance of the electroconductive member is set low to achieve sufficient readout speed, then charge readout speed is improved, but heat generation increases causing dark current increase

Engineering Contradiction:
Improvecharge readout speedVSAvoiddark current
Core Design Contradiction:
SpeedVSObject-generated harmful factors

Solution Approach 1:

The electroconductive member is divided into multiple regions with different electric resistances. Specifically, it includes a first region with higher resistance and a second region with lower resistance, allowing different portions to serve different functions in the charge transfer process

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the electroconductive member are assigned different resistance characteristics tailored to their specific functions. The first region with higher resistance suppresses dark current, while the second region with lower resistance enables fast charge transfer, optimizing local performance for each functional requirement

Inventive Principle:
Principle #3Local quality

2Object-generated harmful factors

If the electric resistance of the electroconductive member is set high to suppress heat generation and dark current, then dark current is reduced, but charge readout speed decreases

Engineering Contradiction:
Improvedark currentVSAvoidcharge readout speed
Core Design Contradiction:
Object-generated harmful factorsVSSpeed

Solution Approach 1:

The electroconductive member is divided into multiple regions with different electric resistances. Specifically, it includes a first region with higher resistance and a second region with lower resistance, allowing different portions to serve different functions in the charge transfer process

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the electroconductive member are assigned different resistance characteristics tailored to their specific functions. The first region with higher resistance suppresses dark current, while the second region with lower resistance enables fast charge transfer, optimizing local performance for each functional requirement

Inventive Principle:
Principle #3Local quality

3Manufacturing precision

If the electric resistivity of the electroconductive member is set to reduce dispersion, then manufacturing consistency is improved, but operation stability may be compromised

Engineering Contradiction:
Improveelectric resistance consistencyVSAvoidoperation stability
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The electroconductive member is segmented into regions with different resistance values, where each region can be independently optimized. This allows the overall system to achieve both low dispersion through controlled fabrication of individual regions and proper operational characteristics through the combined effect of the segmented structure

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The electroconductive member uses a composite structure with regions of different resistivity, combining the advantages of both high-resistance (low dark current) and low-resistance (fast transfer) materials in a single integrated component

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach reduces dispersion in electric resistance, ensuring stable operation and characteristics by maintaining uniform charge readout speed and heat generation across the device, thereby enhancing the reliability of the solid state imaging device.

Implementation Method 1

the electroconductive member includes a first region having a first electric resistivity and a second region having a second electric resistivity smaller than the first electric resistivity

Methodology Applied
Scientific EffectElectrical conduction: Conduction (electrical)

Implementation Method 2

a photoelectric conversion portion having a plurality of photosensitive regions to generate respective charges according to incidence of light

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Data Source

PatentEP2665097B1Semiconductor imaging device
Publication Date: 2018.05.30 HAMAMATSU PHOTONICS KK
  • EP2665097B1 patent drawingFigure 1
  • EP2665097B1 patent drawingFigure 2
  • EP2665097B1 patent drawingFigure 3

AI summary

A solid state imaging device 1 is provided with a photoelectric conversion portion 2 having a plurality of photosensitive regions 7, and a potential gradient forming portion 3 having an electroconductive member 8 arranged opposite to the photosensitive regions 7. A planar shape of each photosensitive region 7 is a substantially rectangular shape. The photosensitive regions 7 are juxtaposed in a first direction intersecting with the long sides. The potential gradient forming portion 3 forms a potential gradient becoming higher along a second direction from one of the short sides to the other of the short sides of the photosensitive regions 7. The electroconductive member 8 includes a first region 8a extending in the second direction and having a first electric resistivity, and a second region 8b extending in the second direction and having a second electric resistivity smaller than the first electric resistivity.