Segmented Electrostatic Lens for Ion Beam Control
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Solution Overview
Problem
Existing electrostatic triode deceleration lenses in ion implanters suffer from significant space charge effects that cause ion beam divergence and energy loss, limiting the effective dose and shape control of the ion beam, especially at lower energies.
Innovation Solution
A segmented electrostatic lens design is introduced, featuring independently biased multiple segments within the suppression electrode to create customizable electric fields that accelerate and decelerate the ion beam, reducing divergence and energy spread by using a center electrode and symmetrically or asymmetrically positioned side electrodes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Use of energy by moving object
If a conventional electrostatic triode deceleration lens is used to manipulate ion beam energy, then the ion beam can be decelerated to desired energy levels, but significant space charge effects cause ion beam divergence and shape degradation
Solution Approach 1:
The suppression electrode is divided into multiple independently biased segments (e.g., three segments: left, center, right) that can be controlled separately. This segmentation allows creation of customized electric field distributions that counteract space charge effects and maintain ion beam focus during deceleration, resolving the contradiction between energy manipulation and shape preservation.
Solution Approach 2:
Different segments of the suppression electrode are biased at different voltages to create localized electric field variations. The center segment may be biased differently from the side segments to provide focused control over the ion beam's central region versus edges, addressing the space charge divergence problem through localized field customization.
2Device complexity
If single-piece electrodes are used in the deceleration lens, then the device structure is simple, but the ability to manipulate ion beam shape and correct divergence is limited
Solution Approach 1:
The suppression electrode is segmented into multiple independently controllable sections, transforming a simple single-piece electrode into a multi-functional control structure. This segmentation enables versatile ion beam manipulation while maintaining relatively simple overall device architecture.
Solution Approach 2:
The segmented electrode structure allows dynamic adjustment of electric fields by independently varying the voltage on each segment. This dynamic control capability enables real-time adaptation to different ion beam conditions and manipulation requirements without changing the physical structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The segmented electrostatic lens effectively manipulates the ion beam's energy and shape, reducing divergence and energy loss, thereby enhancing the ion beam's focus and delivery efficiency to the target wafer.
Implementation Method 1
A segmented electrostatic lens design is introduced, featuring independently biased multiple segments within the suppression electrode to create customizable electric fields that accelerate and decelerate the ion beam
Implementation Method 2
The segmented electrostatic lens effectively manipulates the ion beam's energy and shape, reducing divergence and energy loss
Data Source
AI summary
A technique for providing a segmented electrostatic lens in an ion implanter is disclosed. In one particular exemplary embodiment, the technique may be realized as an electrostatic lens for use in an ion implanter. The lens may comprise an entrance electrode biased at a first voltage potential, wherein an ion beam enters the electrostatic lens through the entrance electrode. The lens may also comprise an exit electrode biased at a second voltage potential, wherein the ion beam exits the electrostatic lens through the exit electrode. The lens may further comprise a suppression electrode located between the entrance electrode and the exit electrode, the suppression electrode comprising a plurality of segments that are independently biased to manipulate an energy and a shape of the ion beam.