Segmented EUV Source Vanes for Tin Clog Control
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Solution Overview
Problem
EUV lithography systems face issues with tin clogging and contamination of the collector due to non-uniform temperature distribution in the vessel, leading to reduced performance and increased maintenance downtime.
Innovation Solution
A thermal control system with segmented thermal control elements, such as vanes, that provide localized climate control to stabilize vessel temperature, detecting and adjusting parameters to balance temperature variations and minimize tin accumulation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If thermal control elements are used to stabilize vessel temperature, then tin clogging and contamination are reduced, but device complexity increases
Solution Approach 1:
The thermal control system is divided into multiple independently controllable thermal control elements (vanes) positioned at different locations within the vessel. Each vane can be independently adjusted to control temperature in its specific region, allowing localized temperature management to prevent tin accumulation and clogging throughout the vessel.
Solution Approach 2:
Different regions of the vessel receive differentiated thermal control through individually adjustable vanes. The system applies local quality by allowing each thermal control element to be independently controlled based on specific temperature requirements at different vessel locations, rather than applying uniform temperature control throughout.
2Stability of the object's composition
If segmented thermal control elements are implemented, then temperature uniformity improves, but manufacturing complexity increases
Solution Approach 1:
The thermal control system uses multiple segmented vanes that can be independently positioned and controlled. This segmentation allows the system to achieve uniform temperature distribution by adjusting individual vanes, while the modular nature of the segmented design facilitates easier manufacturing and assembly compared to a monolithic thermal control system.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Reduces tin clogging and contamination, enhancing EUV source performance and reducing maintenance downtime by maintaining a stable vessel temperature.
Implementation Method 1
activating a first heating element in a first vane segment of a vane based on an adjustable setpoint
Implementation Method 2
provide localized control for heating of a vane segment
Data Source
AI summary
An extreme ultraviolet (EUV) source includes a collector associated with the vessel. The extreme ultraviolet (EUV) source includes a plurality of vanes along walls of the vessel. Each vane includes a stacked vane segment, and the stacked vane segments for each vane are stacked in a direction of drainage of tin (Sn) in the vessel. The EUV source includes a thermal control system comprising a plurality of independently controllable heating elements, where a heating element is configured to provide localized control for heating of a vane segment of the stacked vane segments.