Segmented Ferromagnetic Layers in Magnetic Tunnel Junctions

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Magnetic memory devices face limitations in achieving improved read and write margins and interface characteristics between the tunnel barrier layer and adjacent ferromagnetic layers, which affect their performance in terms of speed and power consumption.

Innovation Solution

A magnetic memory device is designed with a specific structure including a tunnel barrier layer and ferromagnetic layers, where the first layer has a higher orientation and crystal structure similarity to the tunnel barrier layer, and the second layer has a greater exchange coupling force with a nonmagnetic layer, optimized through annealing processes to enhance the magnetic resistance ratio and interface characteristics.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a conventional MTJ structure with two magnetic substances and an insulating layer is used, then the device structure is simple, but the read and write margins are insufficient

Engineering Contradiction:
Improveread and write marginVSAvoidMTJ structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The ferromagnetic layer is divided into multiple sub-layers (first ferromagnetic layer, second ferromagnetic layer, third ferromagnetic layer) with different crystal orientations. Each sub-layer serves a specific function: the first layer provides high orientation for interface characteristics, the second layer provides exchange coupling, and the third layer provides magnetization stability. This segmentation resolves the contradiction by improving read/write margin through functional differentiation while maintaining overall structural simplicity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the ferromagnetic layer are assigned different crystal structures and orientations. The first ferromagnetic layer has high orientation with the tunnel barrier layer for optimal interface characteristics, while the second layer has different orientation for exchange coupling. This local quality differentiation allows each region to optimize its function, improving overall device reliability without requiring complete structural redesign.

Inventive Principle:
Principle #3Local quality

2Reliability

If the ferromagnetic layer has uniform crystal structure throughout, then the manufacturing process is simple, but the interface characteristics between tunnel barrier layer and ferromagnetic layer are insufficient

Engineering Contradiction:
Improveinterface characteristicVSAvoidmanufacturing process complexity
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The first ferromagnetic layer is designed with high crystal orientation toward the tunnel barrier layer before the other layers are deposited. This preliminary action ensures optimal interface characteristics are established first, which then serve as a foundation for subsequent layer deposition. The high orientation is achieved through controlled deposition conditions and post-deposition annealing, improving interface characteristics without requiring complex post-processing.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The crystal orientation parameter of the ferromagnetic layer is changed by introducing multiple layers with different orientations. The first layer is oriented at a specific angle (e.g., <100>) toward the tunnel barrier layer, while subsequent layers have different orientations. This parameter change improves interface characteristics by matching crystal structures, and the manufacturing complexity is managed through controlled deposition parameters and standard annealing processes.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If the ferromagnetic layer is made thicker to improve magnetic properties, then the magnetic resistance ratio increases, but the device area and capacitance increase

Engineering Contradiction:
Improvemagnetic resistance ratioVSAvoiddevice area
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The ferromagnetic layer is segmented into multiple thin sub-layers instead of using a single thick layer. Each sub-layer has a specific thickness optimized for its function, and the total magnetic property is achieved through the cumulative effect of multiple layers. This segmentation allows the device to achieve high magnetic resistance ratio with reduced total thickness, thereby reducing device area and capacitance while maintaining or improving magnetic properties.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The ferromagnetic layer is constructed as a composite structure with multiple materials or compositions having different magnetic properties. By combining materials with different saturation magnetizations and anisotropy, the device achieves high magnetic resistance ratio with reduced overall thickness. The composite structure allows optimization of each layer's contribution to magnetic properties, improving reliability without increasing device area.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration improves the read and write margins and reliability of magnetic memory devices by increasing the magnetic resistance ratio and interface characteristics, enabling faster and more efficient data storage and retrieval.

Implementation Method 1

Such a MTJ may have a different resistance value according to magnetization directions of the two magnetic substances

Methodology Applied
Scientific EffectMagnetoresistance: Magnetoresistance

Implementation Method 2

optimized through annealing processes to enhance the magnetic resistance ratio and interface characteristics

Methodology Applied
Scientific EffectAnnealing: Annealing

Data Source

PatentUS8722211B2Magnetic memory devices and methods of manufacturing such magnetic memory devices
Publication Date: 2014.05.13 SAMSUNG ELECTRONICS CO LTD
  • US8722211B2 patent drawing
  • US8722211B2 patent drawing
  • US8722211B2 patent drawing

AI summary

A magnetic memory device may include a first ferromagnetic layer, a second ferromagnetic layer, and a tunnel barrier layer arranged on a substrate. The tunnel barrier layer may include a crystal structure and may be arranged between the first ferromagnetic layer and the second ferromagnetic layer. At least the first ferromagnetic layer may include a first layer in contact with the tunnel barrier layer and a second layer in contact with the first layer, and an orientation of the first layer with respect to the tunnel barrier layer may be greater than an orientation of the second layer with respect to the tunnel barrier layer.