Segmented Fluid Filtration for CMP Slurry Quality

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Solution Overview

Problem

In semiconductor fabrication, existing fluid processing systems face challenges in maintaining the desired distribution of abrasive particles in chemically corrosive agents used in CMP slurry, leading to inefficiencies and potential particle agglomeration that can interfere with downstream processes.

Innovation Solution

A fluid filtration apparatus with a movable enclosure and multiple filter housings in series, each supporting filters with progressively smaller pore sizes, allows for continuous filtration and on-line maintenance, reducing downtime and particle agglomeration by ensuring consistent slurry quality.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If traditional filtration systems are used, then particle distribution can be maintained, but system downtime increases due to filter replacement and maintenance

Engineering Contradiction:

Improveslurry quality consistencyVSAvoidoperational downtime

Core Design Contradiction:

ReliabilityVSLoss of time

Solution Approach 1:

The filtration system is divided into multiple independent filter housings (first, second, third filter housings) that can operate independently. Each housing contains its own filter cartridge, allowing one filter to be replaced or maintained while others continue filtering slurry, thus eliminating complete system shutdowns.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The system maintains continuous filtration capability through multiple parallel filter housings. When one filter requires maintenance, the slurry flow is redirected to remaining functional filters, ensuring the filtration process never stops and operational continuity is preserved.

Inventive Principle:

Principle #20Continuity of useful action

2Productivity

If multiple filter housings are used, then continuous filtration is achieved, but device complexity increases

Engineering Contradiction:

ImprovethroughputVSAvoidsystem structure

Core Design Contradiction:

ProductivityVSDevice complexity

Solution Approach 1:

Multiple filter housings are integrated into a single unified system with common inlet and outlet manifolds. The housings share pump connections and control systems, reducing overall system complexity compared to having completely separate filtration systems while maintaining continuous operation capability.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

Each filter housing is designed with identical multi-functional capabilities to handle various filter cartridge sizes and types. The standardized design allows any housing to perform any filtration task, simplifying system operation and maintenance while supporting high throughput requirements.

Inventive Principle:

Principle #6Universality (Multi-functionality)

3Manufacturing precision

If filters with progressively smaller pore sizes are used, then filtration precision improves, but flow resistance increases

Engineering Contradiction:

Improveparticle distribution controlVSAvoidflow pressure drop

Core Design Contradiction:

Manufacturing precisionVSStress or pressure

Solution Approach 1:

The filtration process is segmented across multiple filter housings with different pore sizes. Coarser filters handle initial particle removal with minimal pressure drop, while finer filters process already-partially-filtered slurry, reducing the pressure penalty of fine filtration and maintaining precise particle distribution control.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Each filter housing performs partial filtration rather than attempting complete filtration in a single stage. The progressive filtration approach removes particles in stages, achieving precise particle distribution while keeping pressure drops at manageable levels across each individual filter.

Inventive Principle:

Principle #16Partial or excessive action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system enhances yield and reduces operational downtime by maintaining slurry quality and preventing particle agglomeration, enabling higher throughput and minimizing space requirements through continuous processing and efficient filter management.

Implementation Method 1

each filter housing is configured to support a filter cartridge in a filtered position to filter a substantially continuous flow of slurry

Methodology Applied

Scientific EffectFiltration: Filter (physical)

Data Source

PatentUS8974677B2Fluid processing

Publication Date: 2015.03.10 FUJIFILM ELECTRONIC MATERIALS U S A INC

AI summary

Fluid processing apparatuses and systems are disclosed. In some embodiments the fluid processing apparatuses include a movable enclosure, a plurality of filter housings disposed substantially within the movable enclosure, and a stand disposed within the enclosure. The filter housings are in fluid communication with one another. Each filter housing defines an elongate path and is configured to support a respective filter along the elongate flow path to filter a substantially continuous flow of fluid. The stand supports each filter housing such that the elongate flow path of each filter housing is substantially parallel to a vertical axis, wherein each filter housing is independently rotatable, relative to the stand.