Segmented Gas Outlet Surface for Large Substrate Coating
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Solution Overview
Problem
Existing coating devices face challenges in efficiently coating large-area substrates with a susceptor diagonal of two to three meters, requiring a gas inlet element that extends over the entire surface while maintaining a process chamber height of only a few centimeters, necessitating an innovative gas distribution system for uniform gas distribution.
Innovation Solution
A gas outlet surface formed by connected gas distribution chambers made of multiple gas outlet plates, with adjustable height and overlapping mechanisms, allowing for flexible assembly and heating, and featuring a showerhead-like design with uniformly distributed gas outlet openings to ensure comprehensive coverage and efficient gas delivery.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a single large gas outlet surface is used to cover the entire susceptor area, then uniform gas distribution over large substrates is achieved, but manufacturing complexity and difficulty increase significantly
Solution Approach 1:
The gas outlet surface is divided into multiple separate gas outlet plates (at least two) that are arranged adjacent to each other to form a composite gas distribution system. Each plate can be manufactured independently with uniform gas outlet openings, and they are positioned side-by-side to collectively cover the entire susceptor area. This segmentation enables easier manufacturing of individual plates while achieving uniform gas distribution across large substrates when assembled together.
2Area of stationary object
If the gas inlet element extends over the entire susceptor surface area, then complete substrate coverage is achieved, but the device size and complexity increase
Solution Approach 1:
The gas inlet element is segmented into multiple gas outlet plates of manageable sizes that are arranged adjacent to each other. Each plate is a separate, simpler component that can be manufactured and positioned independently. Collectively, these segmented plates cover the entire susceptor surface area required for large substrate processing, reducing the complexity of individual components while maintaining complete coverage.
Solution Approach 2:
Multiple gas outlet plates are combined and positioned adjacent to each other to form a unified gas distribution system that covers the entire susceptor area. The plates work together as an integrated system, with gas flowing through all plates simultaneously to achieve uniform distribution across the large substrate surface, effectively merging multiple simple components into a comprehensive solution.
3Adaptability or versatility
If multiple gas distribution chambers are used for different process gases, then versatile process gas delivery is achieved, but the gas inlet element structure becomes more complex
Solution Approach 1:
The gas inlet element is segmented into multiple gas distribution chambers, with each chamber responsible for delivering a specific process gas or precursor through its assigned gas outlet plate. This segmentation allows different gases to be delivered independently and simultaneously, providing versatility for multi-step deposition processes while keeping each chamber's structure relatively simple and manageable.
Solution Approach 2:
Each gas distribution chamber and its associated gas outlet plate are designed to handle specific process gases, enabling the system to perform multiple deposition functions. The modular design allows the same basic chamber and plate structure to be replicated for different gases, achieving versatility through standardized multi-functional units rather than complex integrated design.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables uniform and efficient deposition of process gases onto large substrates, ensuring effective condensation of organic starting materials onto the susceptor, even with a cooled surface, while allowing for easy manufacturing and adjustment of the gas outlet surface.
Implementation Method 1
At least the gas outlet surface is heated. A carrier gas and a precursor transporting the carrier gas enter the process chamber through the gas outlet openings, the temperature of which is above the condensation temperature of the process gas.
Implementation Method 2
The gaseous precursor condenses on the substrate. This is carried by a cooled susceptor.
Implementation Method 3
This is carried by a cooled susceptor.
Data Source
Figure 1~2
Figure 3~4
Figure 5~6
AI summary
The invention relates to a device for coating a substrate (8), said device comprising a gas inlet member (2) which has a gas distribution chamber (5) comprising a gas outlet surface and which comprises gas outlet openings (6) that are distributed substantially uniformly over the gas outlet surface (2'), through which openings a process gas that is fed into the gas distribution chamber (5) can reach a process chamber (7) and the substrate (8) located on the floor of the process chamber. A gas outlet surface that measures several square meters is formed from a plurality of gas outlet plates (10, 11, 12, 13, 14, 15, 16, 17, 18, 19) that lie on a common plane, wherein adjacent gas outlet plates (10-19) adjoin each other in the region of separation zones, wherein the separation zones are arranged remote from lateral walls (5') that limit the volume of the gas distribution chamber (5).