Segmented Half-Wave Plates for Polarization Control
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Solution Overview
Problem
Current semiconductor microlithography and inspection systems face challenges in improving image resolution through light polarization control, as existing multi-segmented wavelength plates increase manufacturing costs and decrease system performance due to high machining accuracy requirements.
Innovation Solution
A light polarization control apparatus using a pair of four-division or two-division type half-wave plates to divide a linearly polarized light beam into multiple areas, allowing independent control of polarization states without excessively increasing the division number, thereby reducing manufacturing costs and maintaining performance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the number of segmented regions of the wavelength plate is increased to create a multi-segmented radially or azimuthally polarized state, then the polarization control precision is improved, but the manufacturing cost increases and system performance deteriorates due to higher machining accuracy requirements
Solution Approach 1:
The wavelength plate is divided into multiple segmented regions (e.g., four, eight, or more regions) with different optical axis orientations. Each region independently controls the polarization state of incident light, enabling multi-directional radial or azimuthal polarization without requiring a single complex multi-segmented plate, thus reducing manufacturing difficulty while maintaining precision
Solution Approach 2:
Different regions of the wavelength plate are assigned different optical axis directions to create locally optimized polarization control. Each region has tailored optical properties to achieve the desired polarization state in its specific area, allowing precise control of multiple polarization directions simultaneously without increasing overall manufacturing complexity
2Measurement precision
If the number of segmented regions of the wavelength plate is increased to create a multi-segmented radially or azimuthally polarized state, then the polarization control precision is improved, but the system performance decreases due to higher machining accuracy requirements
Solution Approach 1:
The wavelength plate is divided into multiple segmented regions (e.g., four, eight, or more regions) with different optical axis orientations. Each region independently controls the polarization state of incident light, enabling multi-directional radial or azimuthal polarization without requiring a single complex multi-segmented plate, thus reducing manufacturing difficulty while maintaining precision
Solution Approach 2:
Different regions of the wavelength plate are assigned different optical axis directions to create locally optimized polarization control. Each region has tailored optical properties to achieve the desired polarization state in its specific area, allowing precise control of multiple polarization directions simultaneously without increasing overall manufacturing complexity
3Area of stationary object
If the division number of the surface-segmented wavelength plate is increased to control polarization states in more areas, then the area coverage is improved, but the device complexity increases due to higher machining accuracy requirements
Solution Approach 1:
The wavelength plate is divided into multiple segmented regions (e.g., four, eight, or more regions) with different optical axis orientations. Each region independently controls the polarization state of incident light, enabling multi-directional radial or azimuthal polarization without requiring a single complex multi-segmented plate, thus reducing manufacturing difficulty while maintaining precision
Solution Approach 2:
Different regions of the wavelength plate are assigned different optical axis directions to create locally optimized polarization control. Each region has tailored optical properties to achieve the desired polarization state in its specific area, allowing precise control of multiple polarization directions simultaneously without increasing overall manufacturing complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables independent control of polarization states in multiple areas within a light beam, improving image resolution without incurring unwanted cost increases or performance deterioration, thus enhancing the accuracy of micro or nanoscale lithography and inspection processes.
Implementation Method 1
a pair of four-division type half-wave plate which are located at front and back positions of a light axis. The linearly polarized light is guided to pass through the pair of four-divided half-wave plates to thereby divide this light into eight areas. Each area has its polarization state that is convertable to a radially or azimuthally polarized state.
Data Source
AI summary
A light polarization control apparatus includes a linear polarized light generation device for generating a linearly polarized light ray; and a pair of first and second four-division type half-wave plate located at front and back positions of a light axis, each said half-wave plate having a surface divided into four regions by a couple of boundary lines crossing together at right angles, wherein the linearly polarized light ray is guided to pass through said pair of first and second four-division type half-wave plate to thereby divide this light ray into eight areas each having its polarization state as converted to any one of a azimuthally polarized state and a radially polarized state.