Segmented Image Sensor Inspection for High-Resolution Defect Sizing
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Solution Overview
Problem
Existing inspection methods using image sensors for detecting objects in devices like semiconductors and secondary batteries face a decrease in image resolution due to the allocation of pixels for multiple wavelength bands, leading to inaccurate size measurement of objects.
Innovation Solution
An inspection apparatus and method that utilizes an image sensor with separate regions for capturing images in different wavelength bands, calculating reflectance based on feature quantities from these regions, and correcting the image output to maintain resolution while determining physical properties of objects.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If pixels are allocated for multiple wavelength bands to detect objects with different physical properties, then the ability to determine physical properties is improved, but the image resolution decreases
Solution Approach 1:
The image sensor is divided into multiple imaging regions, with each region dedicated to capturing images in a specific wavelength band. This segmentation allows each region to use its pixels efficiently for a single wavelength band, avoiding the resolution loss that would occur if pixels were shared across multiple wavelength bands. The segmented structure enables simultaneous multi-wavelength imaging while maintaining high resolution in each band.
2Reliability
If a spectral image of multiple wavelength bands is generated to detect objects, then the detection capability is improved, but the image quality and resolution deteriorate
Solution Approach 1:
Instead of combining multiple wavelength bands into a single spectral image that compromises resolution, the patent captures images in multiple wavelength bands simultaneously using spatially separated imaging regions. This approach adds a spatial dimension to the imaging system, allowing each wavelength band to be captured with full resolution independently. The multiple high-resolution images from different wavelength bands provide both detection capability and image quality.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method allows for accurate determination of object physical properties while preventing a decrease in image resolution, enabling clear and precise size measurement of defects or foreign substances.
Implementation Method 1
calculating a first reflectance of the object based on at least one of the plurality of first feature quantities and at least one of the plurality of reference feature quantities, the first reflectance being a reflectance in the first wavelength band
Data Source
AI summary
An inspection apparatus includes an image sensor including a first imaging region and a reference imaging region. The first imaging region includes first pixels which capture an image of an object in a first wavelength band and output first feature quantities each of which corresponds to one of first pixels. The reference imaging region includes reference pixels which capture an image of the object in a reference wavelength band, which overlaps with the first wavelength band, and output reference feature quantities each of which corresponds to one of reference pixels. An image processing device obtains a reflectance of the object in the first wavelength band based on at least one first feature quantity and reference feature quantity and determines physical properties of the object based on the reflectance. The image processing device corrects the image of the object generated according to output from the image sensor based on the at least one first feature quantity and reference feature quantity.