Segmented Jig for Cleaning Member Attachment in Tight Spaces

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Solution Overview

Problem

In semiconductor manufacturing, the narrow spacing between cleaning members and rotation devices makes it difficult to attach and detach cleaning members without directly touching the bristles, and conventional jigs struggle to release the locking mechanism when there is insufficient space.

Innovation Solution

A jig with clamping pieces that intersect and are openable, a connecting mechanism including a rotatable connecting shaft and non-rotatable gripping shafts, and a fixing member to maintain the clamped state, allowing for easy attachment and detachment of cleaning members without manual handling, even in tight spaces.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a conventional attaching and detaching jig is used to attach the cleaning member to the rotation device, then the cleaning member can be attached without direct hand contact, but the locking member cannot be pulled out of the jig bodies due to insufficient spacing, preventing detachment

Engineering Contradiction:
Improvecleanliness maintenanceVSAvoiddetachment ability
Core Design Contradiction:
ReliabilityVSEase of operation

Solution Approach 1:

The jig is divided into two separate jig bodies that can be independently manipulated. Each jig body has its own locking member that can be independently operated. This segmentation allows the locking members to be released even when spacing is insufficient, as each half can be handled separately rather than requiring manipulation of a single integrated locking mechanism.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The locking members are designed to be pulled out in directions other than the axial direction of the supporting shafts. By changing the release direction from axial to radial or other dimensions, the detachment operation can be performed even when axial spacing is insufficient, allowing the locking mechanism to be released from different spatial directions.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Volume of moving object

If the spacing between the cleaning member and rotation device is reduced to meet compact design requirements, then the device size is minimized, but hand access becomes impossible, making it difficult to attach and detach the cleaning member without direct hand contact

Engineering Contradiction:
Improvedevice compactnessVSAvoidattachment and detachment ease
Core Design Contradiction:
Volume of moving objectVSEase of operation

Solution Approach 1:

By dividing the jig into two separate halves, each half can be independently inserted and manipulated through the narrow spacing. The segmented design allows the operator to work with smaller individual components rather than a single large jig, enabling operation in confined spaces while maintaining the function of secure attachment and easy detachment.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The two jig bodies act as intermediary tools that can be inserted through the narrow spacing to indirectly manipulate the locking members. Instead of requiring direct hand contact with the cleaning member, the jig bodies serve as mediators that can be introduced through the limited space to perform the attachment and detachment operations.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Strength

If the locking member is designed to hold the cleaning member securely during operation, then the cleaning member remains firmly attached, but the locking member becomes difficult to release when spacing is insufficient

Engineering Contradiction:
Improveholding forceVSAvoidlocking member release
Core Design Contradiction:
StrengthVSEase of operation

Solution Approach 1:

The locking mechanism is segmented into two independent locking members, each associated with a separate jig body. This allows one locking member to be released at a time, reducing the force and space required for release compared to a single integrated locking mechanism. The segmentation enables progressive release rather than requiring simultaneous manipulation of all locking elements.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The locking members are designed to be released by pulling them out in directions other than the axial direction of the supporting shafts. By changing the release direction from axial to radial or other dimensions, the release operation can be performed even when axial spacing is insufficient, allowing the locking mechanism to be released from different spatial directions while maintaining strong axial holding force.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Data Source

PatentUS11524322B2Jig for attaching and detaching cleaning member
Publication Date: 2022.12.13 EBARA CORP
  • US11524322B2 patent drawing
  • US11524322B2 patent drawing
  • US11524322B2 patent drawing

AI summary

The disclosure provides a jig for attaching and detaching a cleaning member, which facilitates attaching and detaching the cleaning member to and from a rotation device without holding the cleaning member directly by hand, even when there is no sufficient spacing around the cleaning member. The jig 100 for attaching and detaching a cleaning member 60 includes a pair of jig bodies 110 capable of clamping two ends 63 of a holder 62 of the cleaning member 60, and a connecting mechanism 120 that interlocks the movements of the pair of jig bodies 110 between a clamped state in which two ends 63 of the holder 62 are clamped and a non-clamped state in which the clamped state is released.