Segmented Lamphead for Rapid Thermal Processing

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Solution Overview

Problem

The existing rapid thermal processing (RTP) lamp arrangements for semiconductor substrates are costly and require frequent maintenance due to the large number of individual lamps needed for precise temperature control, which increases material and maintenance costs.

Innovation Solution

The implementation of a segmented lamp arrangement within a lamphead, where each segmented lamp is aligned substantially parallel to a plane and connected at multiple points, allowing for efficient heat distribution and precise temperature control across the substrate with fewer lamps, reducing the overall number of lamps required.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If numerous individual lamps are arranged in a matrix formation for precise temperature control, then temperature control precision is improved, but device complexity and manufacturing cost increase

Engineering Contradiction:

Improvetemperature control precisionVSAvoidlamp arrangement complexity

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

Each lamp is divided into multiple independently controllable segments along its length, allowing different portions of the substrate to be heated independently. This segmentation enables precise temperature control across the substrate surface while using fewer complete lamps compared to a traditional matrix arrangement.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Each lamp serves multiple functions by providing heating control for multiple radial zones through its segmented structure. A single lamp with multiple segments can replace what would traditionally require multiple separate lamps, reducing overall system complexity while maintaining temperature control precision.

Inventive Principle:

Principle #6Universality (Multi-functionality)

2Stability of the object's composition

If numerous individual lamps are used for regional temperature control, then temperature uniformity across substrate regions is improved, but maintenance cost and lamp replacement frequency increase

Engineering Contradiction:

Improvetemperature uniformityVSAvoidlamp maintenance cost

Core Design Contradiction:

Stability of the object's compositionVSEase of repair

Solution Approach 1:

By segmenting each lamp into multiple independently controllable sections, the system achieves temperature uniformity across different substrate regions while reducing the total number of complete lamps required. This segmentation allows for localized temperature control without requiring a dense matrix of individual lamps.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Multiple lamp functions are merged into fewer lamps through the segmented design. Each lamp with multiple segments combines the heating capability that would traditionally be distributed across many separate lamps, reducing maintenance requirements and replacement frequency.

Inventive Principle:

Principle #5Merging (Combining)

3Stability of the object's composition

If a matrix arrangement of lamps is implemented for substrate heating, then heating uniformity is improved, but material cost and system complexity increase

Engineering Contradiction:

Improveheating uniformityVSAvoidmanufacturing cost

Core Design Contradiction:

Stability of the object's compositionVSEase of manufacture

Solution Approach 1:

The lamp structure is segmented into multiple sections along its length, with each segment capable of independent power control. This enables uniform heating across the substrate by independently adjusting segments corresponding to different radial zones, while using fewer complete lamps than a traditional matrix arrangement.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Each lamp is designed to perform multiple heating functions simultaneously through its segmented structure, allowing a single lamp to provide controlled heating for multiple substrate regions. This multi-functionality reduces the total number of lamps needed, lowering manufacturing cost while maintaining heating uniformity.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution reduces manufacturing and maintenance costs by minimizing the number of lamps needed while maintaining precise temperature control, potentially decreasing lamp replacement frequency and downtime, while allowing for efficient heating and cooling of semiconductor substrates.

Implementation Method 1

Each segmented lamp includes a first wire segment connected to the first end; a first filament connected to the first wire segment

Methodology Applied

Scientific EffectJoule heating: Joule Heating

Data Source

PatentUS10455642B2Rapid thermal processing chamber with linear control lamps

Publication Date: 2019.10.22 APPLIED MATERIALS INC

AI summary

A lamphead for thermal processing of a substrate is provided. The lamphead includes a housing having a first edge surrounding a first plane. The lamphead further includes a plurality of segmented lamps disposed within the housing, each segmented lamp aligned substantially parallel to the first plane. Each segmented lamp includes a first end connected to a location on the housing; a first wire segment connected to the first end; a first filament connected to the first wire segment; an intermediate wire segment connected to the first filament; a second filament connected to intermediate wire segment; a second wire segment connected to the second filament; and a second end connected to the second wire segment; where the second end is connected to an opposing location on the housing.