Segmented Linear Motor Positioning for Vacuum Chamber Heat Control
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Solution Overview
Problem
Existing positioning systems in vacuum chambers face heating issues due to moving coils, which can damage the linear motor, and traditional heat dissipation methods are either impractical or hazardous in a vacuum environment.
Innovation Solution
A positioning system with a linear motor featuring a movable magnetic unit and a coil stator with segmented coil stator segments, where power is selectively supplied to relevant segments to minimize heating, and a static heat reduction element is used to cool the coil stator.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If moving coils are used in the linear motor to move the sample, then the sample can be moved along the desired path, but the coils generate heat that cannot dissipate in vacuum, potentially damaging the linear motor
Solution Approach 1:
The coil stator is divided into multiple coil stator segments along the movement path. Only the segments currently needed for moving the movable magnetic unit are activated, while other segments remain inactive. This segmentation allows selective cooling of active segments and reduces overall heat generation in the system.
Solution Approach 2:
Power is supplied to different coil stator segments in a periodic or sequential manner based on the position of the movable magnetic unit. As the unit moves along the path, different segments are activated and deactivated in sequence, allowing heat to be managed in a periodic fashion rather than continuously across the entire stator.
2Temperature
If traditional heatsinking or water piping is used to cool the moving coils, then heat dissipation may be improved, but these methods are either impractical or hazardous in a vacuum environment
Solution Approach 1:
The cooling function is extracted from the movable parts and applied only to the stationary coil stator segments. Heat reduction elements are attached to the coil stator segments that are located within or near the vacuum chamber, allowing cooling without requiring the entire motor assembly to be vacuum-compatible or requiring complex vacuum-penetrating cooling systems.
Solution Approach 2:
Heat reduction elements serve as intermediary components between the coil stator segments and the vacuum environment. These elements can be thermal conduits, heat sinks, or cooling channels that transfer heat away from the coil stator segments without requiring direct contact with vacuum-sensitive components or introducing complex cooling infrastructure into the vacuum chamber.
3Force
If power is supplied to all coil stator segments simultaneously, then the linear motor can provide sufficient force, but excessive heat is generated across the entire stator
Solution Approach 1:
Power supply and cooling are applied locally to only those coil stator segments that are currently active and contributing to the movement of the movable magnetic unit. Inactive segments receive no power and generate no heat, while active segments receive both power for force generation and cooling to manage the localized heat production. This local quality approach ensures sufficient force where needed while minimizing overall energy loss to heat.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces the heating of the coil stator segments significantly, making it safer and more effective than traditional methods, while allowing precise control over the movement of the sample within the vacuum chamber.
Implementation Method 1
a power supply that is configured to independently supply power to different coil stator segments of the coil stator segments to induce a movement of the movable magnetic unit in relation to the coil stator
Implementation Method 2
a linear motor that includes a movable magnetic unit and a coil stator, the coil stator includes a group of coil stator segments
Implementation Method 3
a heat reduction element that is configured to reduce a temperature of the coil stator
Data Source
AI summary
A positioning system that includes (a) a linear motor that includes a movable magnetic unit and a coil stator, the coil stator includes a group of coil stator segments; wherein the mechanical support unit is mechanically coupled to the movable magnetic unit; (b) a mechanical support element for supporting a sample within a vacuum chamber; (c) a power supply that is configured to independently supply power to different coil stator segments of the coil stator segments to induce a movement of the movable magnetic unit in relation to the coil stator, along a axis; (d) a heat reduction element that is configured to reduce a temperature of the coil stator; and (e) a controller that is configured to control the movement of the movable magnetic unit by controlling the supply of power to the different coil stator segments.