Segmented Liner Gas Flow Uniformity in Semiconductor Batch Processing
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Solution Overview
Problem
Non-uniform gas flow during semiconductor substrate processing leads to control and adjustability issues, thermal uniformity, and deposition uniformity challenges, particularly in complex deposition operations.
Innovation Solution
A process kit for a processing chamber comprising an injector with multiple inject openings and liners with strategically positioned inlet and outlet openings, facilitating uniform gas flow distribution and independent control of gas zones for improved processing uniformity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional gas flow systems are used in batch processing, then device complexity is reduced, but gas flow uniformity and deposition uniformity deteriorate
Solution Approach 1:
The gas flow system is segmented into multiple independent zones using a segmented liner structure with multiple inlet openings and outlet openings. Each zone can be independently controlled to deliver uniform gas flow distribution across the substrate surface, resolving the contradiction between simplified device structure and uniform deposition control.
Solution Approach 2:
Different regions of the liner are designed with different opening configurations to provide locally optimized gas flow characteristics. The liner includes multiple inlet openings at different positions and outlet openings strategically placed to ensure uniform gas distribution in each local region, achieving overall deposition uniformity through local quality control.
2Ease of manufacture
If simple liner structures are used, then ease of manufacture is improved, but gas flow control and thermal uniformity deteriorate
Solution Approach 1:
The liner is designed as a segmented structure with multiple standardized inlet and outlet openings that can be manufactured using consistent processes. This segmentation allows for reliable gas flow control while maintaining manufacturing simplicity through modular design elements.
Solution Approach 2:
The liner structure serves multiple functions simultaneously: it distributes gas flow uniformly, provides thermal management, and enables zonal control. The same segmented liner structure with its pattern of openings achieves all these functions without requiring separate components, improving ease of manufacture while maintaining reliability.
3Manufacturing precision
If uniform gas flow is achieved through complex injector designs, then gas flow uniformity is improved, but device complexity and cost increase
Solution Approach 1:
The liner acts as an intermediary component between the gas supply system and the substrate. Instead of making the injector complex to achieve uniform gas flow, the simple liner structure with its strategically positioned openings serves as the mediating element that transforms the gas flow into a uniform distribution pattern.
Solution Approach 2:
The system achieves gas flow uniformity by changing the parameters of the liner openings (position, size, configuration) rather than changing the injector structure. The inlet and outlet openings are designed with specific geometric parameters that naturally produce uniform gas flow distribution without requiring complex injector mechanisms.
Data Source
AI summary
Embodiments of the present disclosure relate to injectors, liners, process kits, processing chambers, and related methods for gas flow in batch processing operations. In one or more embodiments, the liners facilitate gas flow uniformity in batch processing. In one or more embodiments, a liner includes a plurality of inlet openings on an inlet side, the plurality of inlet openings extending into an outer face of the liner. The plurality of inlet openings include a plurality of first inlet openings that include a first row extending into a first side face, and a second row extending into a second side face. The plurality of inlet openings include a plurality of second inlet openings extending between an inner face and the outer face. The liner includes one or more outlet openings on an outlet side. The outlet side opposes the inlet side. The one or more outlet openings extend into the inner face.