Segmented Ceramic Liner for Microwave Plasma Thermal Shock

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Conventional ceramic liners in microwave plasma reactors suffer from inadequate thermal shock resistance, leading to cracking and failure due to high temperature gradients, resulting in costly repairs and downtime.

Innovation Solution

A segmented ceramic liner design with tailored segments and joints, optimized for improved thermal shock resistance, where the joints are strategically placed at locations of maximum temperature gradients and can be made of materials with enhanced thermal shock properties, such as boron nitride, to minimize cracking and facilitate easier manufacturing and replacement.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If high purity ceramic materials are used for the liner, then microwave energy transparency and high temperature operation capability are improved, but thermal shock resistance deteriorates leading to cracking and failure

Engineering Contradiction:

Improvehigh temperature operation capabilityVSAvoidthermal shock resistance

Core Design Contradiction:

TemperatureVSReliability

Solution Approach 1:

The liner is divided into multiple discrete ceramic segments stacked vertically with joints between them. This segmentation allows each segment to independently accommodate thermal expansion and contraction, preventing the propagation of thermal stress cracks that would occur in a continuous high-purity ceramic liner, thereby maintaining thermal shock resistance while using high-purity materials for microwave transparency and high temperature capability.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The liner system combines high-purity ceramic materials (for microwave transparency and high temperature operation) with materials having superior thermal shock resistance (such as lower purity ceramics or composite materials at the joints). This composite approach allows each material to be used in the zone where its properties are most beneficial, resolving the contradiction between high temperature capability and thermal shock resistance.

Inventive Principle:

Principle #40Composite materials

2Strength

If a continuous ceramic liner is used, then structural integrity is improved, but manufacturability and replacement flexibility deteriorate

Engineering Contradiction:

Improvestructural integrityVSAvoidmanufacturability

Core Design Contradiction:

StrengthVSEase of manufacture

Solution Approach 1:

The liner is divided into multiple discrete ceramic segments stacked vertically with joints between them. This segmentation allows each segment to be manufactured separately using standard manufacturing processes, improving manufacturability. The segments are designed with features such as tapered interfaces or mechanical interlocks that maintain structural integrity when assembled, thus resolving the contradiction between structural integrity and ease of manufacture.

Inventive Principle:

Principle #1Segmentation

3Reliability

If the entire liner is replaced when damaged, then reliability is restored, but operational time and cost increase

Engineering Contradiction:

Improveliner functionalityVSAvoidoperational downtime

Core Design Contradiction:

ReliabilityVSLoss of time

Solution Approach 1:

The liner is divided into multiple discrete ceramic segments stacked vertically with joints between them. This segmentation enables individual segments to be removed and replaced independently without replacing the entire liner assembly. When a segment becomes damaged or contaminated, only that specific segment needs to be replaced, significantly reducing operational downtime and maintenance costs while restoring liner functionality, thus resolving the contradiction between reliability restoration and operational time loss.

Inventive Principle:

Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The segmented liner design significantly reduces the likelihood of cracking, enhances manufacturability, and allows for selective replacement of damaged segments, thereby extending the liner's life and minimizing operational disruptions.

Implementation Method 1

The primary failure mode of the liner is cracking due to high temperature gradients under normal operating conditions. This is due in part to inadequate thermal shock resistance of the ceramic materials.

Methodology Applied

Scientific EffectThermal shock: Thermal Shock

Implementation Method 2

the joints between the adjacent vertically stacked ceramic segments forming the improved liner are located where a temperature gradient is the greatest for a particular set of plasma operating conditions

Methodology Applied

Scientific EffectTemperature gradient: Temperature Gradient

Implementation Method 3

These high temperature ceramics are selected to allow high temperature operation of the plasma environment and to provide microwave energy transparency

Methodology Applied

Scientific EffectMicrowave transparency: Dielectric

Data Source

PatentUS12167528B2Segmented liner and methods of use within a microwave plasma apparatus

Publication Date: 2024.12.10 6K INC

AI summary

Disclosed herein are devices, systems and methods of use of an improved liner for a plasma torch. In particular, a segmented liner for use in a plasma torch (e.g., annular torch, swirl torch) is provided. In general, the improved segmented liner has improved thermal shock resistance capabilities over conventional unitary liners.