Segmented Magnetic Core for Plasma Reactor Edge Crack Prevention

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Solution Overview

Problem

The existing plasma reaction apparatuses suffer from edge cracks in magnetic cores due to severe thermal deviations, leading to reduced plasma generation efficiency and potential apparatus breakage, especially as substrate sizes increase in semiconductor manufacturing.

Innovation Solution

The apparatus divides the magnetic core into multiple layers, with cooling plates and thermal pads to reduce thermal deviations, and uses convex round surfaces for improved ignition, preventing edge cracks and enhancing stability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the magnetic core is used as a single integrated structure, then the plasma generation capability is maintained, but severe thermal deviation occurs at the upper and lower edges causing edge cracks and reducing reliability

Engineering Contradiction:

Improvemagnetic core integrityVSAvoidthermal deviation at edges

Core Design Contradiction:

ReliabilityVSTemperature

Solution Approach 1:

The magnetic core is divided into multiple separate core layers (first core layer, second core layer, third core layer, fourth core layer) stacked in sequence. This segmentation allows each layer to be independently cooled and reduces the accumulation of thermal deviation at the edges, preventing edge cracks while maintaining the overall magnetic core functionality for plasma generation.

Inventive Principle:

Principle #1Segmentation

2Reliability

If the magnetic core is divided into multiple layers, then thermal deviation at edges is reduced preventing edge cracks, but the device complexity increases

Engineering Contradiction:

Improvemagnetic core integrityVSAvoidmagnetic core structure

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Multiple core layers are stacked and combined to form the complete magnetic core structure. The first and second core layers are positioned at the upper portion, while the third and fourth core layers are positioned at the lower portion, with cooling plates integrated between layers. This merging approach maintains the functional equivalence of a single magnetic core while distributing thermal loads across multiple segments.

Inventive Principle:

Principle #5Merging (Combining)

3Reliability

If cooling plates and thermal pads are added to reduce thermal deviation, then edge cracks are prevented, but the device complexity and manufacturing difficulty increase

Engineering Contradiction:

Improvemagnetic core integrityVSAvoidmagnetic core assembly

Core Design Contradiction:

ReliabilityVSEase of manufacture

Solution Approach 1:

Cooling plates are inserted between the core layers as intermediary components to facilitate heat dissipation. Thermal pads are placed between the coil and the magnetic core, and between core layers, to conduct heat away from critical areas. These intermediary elements act as thermal bridges that reduce thermal deviation at the edges without requiring fundamental changes to the magnetic core design.

Inventive Principle:

Principle #24Intermediary (Mediator)

4Productivity

If the magnetic core structure is modified to prevent edge cracks, then plasma generation efficiency is maintained, but the apparatus occupies more space

Engineering Contradiction:

Improveplasma generation efficiencyVSAvoidmagnetic core assembly volume

Core Design Contradiction:

ProductivityVSVolume of stationary object

Solution Approach 1:

The magnetic core is configured as multiple layers stacked in the vertical dimension rather than a single horizontal structure. This dimensional change allows the cooling plates to be integrated between layers, utilizing the vertical space for thermal management without significantly increasing the horizontal footprint of the apparatus, thereby maintaining plasma generation efficiency while preventing edge cracks.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration effectively prevents edge cracks in the magnetic core, stabilizes block ignition, and increases the durability and efficiency of plasma generation.

Implementation Method 1

a primary coil to generate plasma by exciting a gas in the annular loop space

Methodology Applied

Scientific EffectElectromagnetic induction: Electromagnetic Induction

Implementation Method 2

cooling plates and thermal pads to reduce thermal deviations

Methodology Applied

Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS20230245866A1Plasma reaction apparatus

Publication Date: 2023.08.03 NEW POWER PLASMA CO LTD

AI summary

Provided is a plasma reaction apparatus capable of preventing edge cracks of a magnetic core by dividing the core, the plasma reaction apparatus including a reactor body having a gas inlet at a side thereof, a plasma outlet at another side thereof, and an annular loop space therein, and a magnetic core provided in a shape surrounding at least a part of the reactor body, and having a primary coil to generate plasma by exciting a gas in the annular loop space, wherein the magnetic core includes a middle core layer, an upper core layer mounted on the middle core layer, and a lower core layer mounted under the middle core layer, wherein the upper core layer is divided into a first core layer and a second core layer to prevent edge cracks of the upper core layer by reducing an upper thermal deviation, and wherein the lower core layer is divided into a third core layer and a fourth core layer to prevent edge cracks of the lower core layer by reducing a lower thermal deviation.